Hideyuki Noguchi

Follow

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for cleaning treatment chamber in substrate treating apparat...
- Patent number 7,887,637
- Issue date Feb 15, 2011
- Tokyo Electron Limited
- Shigenori Ozaki
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
PLASMA NITRIDING METHOD AND PLASMA NITRIDING APPARATUS
- Publication number 20130017690
- Publication date Jan 17, 2013
- TOKYO ELECTRON LIMITED
- Koichi Takatsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for cleaning treatment chamber iIn substrate treating appara...
- Publication number 20070163617
- Publication date Jul 19, 2007
- Tokyo Electron Limited
- Shigenori Ozaki
- B08 - CLEANING