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Hideyuki Takahashi
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Kitaibaraki, JP
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last 30 patents
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Patent Grant
Method of manufacturing member for thin-film formation apparatus an...
Patent number
6,319,419
Issue date
Nov 20, 2001
Japan Energy Corporation
Tateo Ohhashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering target free of surface-deformed layers
Patent number
6,284,111
Issue date
Sep 4, 2001
Nikko Materials Company, Limited
Hideyuki Takahashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing member for thin-film formation apparatus an...
Patent number
6,045,665
Issue date
Apr 4, 2000
Japan Energy Corporation
Tateo Ohhashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Sputtering target and method for the manufacture thereof
Publication number
20010030172
Publication date
Oct 18, 2001
Hideyuki Takahashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...