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Substrate treating method
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Patent number 6,451,515
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Issue date Sep 17, 2002
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Tokyo Electron Limited
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Hideyuki Takamori
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Spin coating apparatus
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Patent number 6,447,608
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Issue date Sep 10, 2002
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Tokyo Electron Limited
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Mitsuhiro Sakai
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Substrate processing method
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Patent number 6,306,455
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Issue date Oct 23, 2001
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Tokyo Electron Limited
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Hideyuki Takamori
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H01 - BASIC ELECTRIC ELEMENTS
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Substrate processing apparatus
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Patent number 6,264,748
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Issue date Jul 24, 2001
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Tokyo Electron Limited
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Yasuyuki Kuriki
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Spin coating process
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Patent number 6,159,541
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Issue date Dec 12, 2000
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Tokyo Electron Limited
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Mitsuhiro Sakai
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Heat treatment device
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Patent number 5,514,852
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Issue date May 7, 1996
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Tokyo Electron Limited
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Hideyuki Takamori
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F27 - FURNACES KILNS OVENS RETORTS
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