Hideyuki Tashiro

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 6,381,004
- Issue date Apr 30, 2002
- Nikon Corporation
- Tsuneyuki Hagiwara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical detection system for detecting defects and/or particles on...
- Patent number 5,907,396
- Issue date May 25, 1999
- Nikon Corporation
- Koichiro Komatsu
- G01 - MEASURING TESTING
Information Patent Grant
Foreign particle inspection apparatus
- Patent number 5,623,340
- Issue date Apr 22, 1997
- Nikon Corporation
- Kenji Yamamoto
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection apparatus
- Patent number 5,473,426
- Issue date Dec 5, 1995
- Nikon Corporation
- Fuminori Hayano
- G01 - MEASURING TESTING
Information Patent Grant
Foreign particle inspecting method and apparatus with correction fo...
- Patent number 5,436,464
- Issue date Jul 25, 1995
- Nikon Corporation
- Fuminori Hayano
- G01 - MEASURING TESTING