Hideyuki Tsurumaki

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for calculating drawing speeds of a charged pa...
- Patent number 9,589,766
- Issue date Mar 7, 2017
- NuFlare Technology, Inc.
- Hideyuki Tsurumaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing method, computer-readable recording m...
- Patent number 9,460,892
- Issue date Oct 4, 2016
- NuFlare Technology, Inc.
- Sumito Nakada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam writing method and apparatus and readable sto...
- Patent number 7,619,230
- Issue date Nov 17, 2009
- Nuflare Technology, Inc.
- Junichi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and method thereof, and met...
- Patent number 7,608,845
- Issue date Oct 27, 2009
- Nuflare Technology, Inc.
- Takayuki Abe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM D...
- Publication number 20150380213
- Publication date Dec 31, 2015
- NuFlare Technology, Inc.
- Hideyuki TSURUMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD, COMPUTER-READABLE RECORDING M...
- Publication number 20140166869
- Publication date Jun 19, 2014
- NuFlare Technology, Inc.
- Sumito NAKADA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD THEREOF, AND MET...
- Publication number 20080182185
- Publication date Jul 31, 2008
- NuFlare Technology, Inc.
- Takayuki Abe
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD AND APPARATUS AND READABLE STO...
- Publication number 20070114459
- Publication date May 24, 2007
- NuFlare Technology, Inc.
- Junichi SUZUKI
- B82 - NANO-TECHNOLOGY