Hideyuki Tsutsumi

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Kawasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus for resist film removal
- Patent number 7,191,785
- Issue date Mar 20, 2007
- Tokyo Electron Limited
- Takayuki Toshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and apparatus
- Patent number 6,613,692
- Issue date Sep 2, 2003
- Tokyo Electron Limited
- Takayuki Toshima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus for resist film removal
- Publication number 20070204885
- Publication date Sep 6, 2007
- TOKYO ELECTRON LIMITED
- Takayuki Toshima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing method and apparatus
- Publication number 20050011537
- Publication date Jan 20, 2005
- TOKYO ELECTRON LIMITED
- Takayuki Toshima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY