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Hideyuki Yamamoto
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Tosu-Shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Ultrasonic cleaning apparatus, ultrasonic cleaning method, and stor...
Patent number
8,567,417
Issue date
Oct 29, 2013
Tokyo Electron Limited
Yuji Kamikawa
B08 - CLEANING
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Patent Grant
Substrate processing apparatus
Patent number
7,998,306
Issue date
Aug 16, 2011
Tokyo Electron Limited
Koukichi Hiroshiro
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ULTRASONIC CLEANING APPARATUS, ULTRASONIC CLEANING METHOD, AND STOR...
Publication number
20110079240
Publication date
Apr 7, 2011
TOKYO ELECTRON LIMITED
Yuji KAMIKAWA
B08 - CLEANING
Information
Patent Application
Substrate processing apparatus
Publication number
20090139656
Publication date
Jun 4, 2009
TOKYO ELECTRON LIMITED
Koukichi Hiroshiro
H01 - BASIC ELECTRIC ELEMENTS