Hikaru Adachi

Person

Hyogo-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Acquisition method for S-parameters in microwave introduction modul...
- Patent number 9,702,913
- Issue date Jul 11, 2017
- Tokyo Electron Limited
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method
- Patent number 8,183,165
- Issue date May 22, 2012
- Tokyo Electron Limited
- Seiji Matsuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma oxidizing method, plasma processing apparatus, and storage m...
- Patent number 7,910,495
- Issue date Mar 22, 2011
- Tokyo Electron Limited
- Toshihiko Shiozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and computer storage medium
- Patent number 7,897,518
- Issue date Mar 1, 2011
- Tokyo Electron Limited
- Seiji Matsuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method and computer storage medium
- Patent number 7,723,241
- Issue date May 25, 2010
- Tokyo Electron Limited
- Seiji Matsuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 7,226,524
- Issue date Jun 5, 2007
- Tokyo Electron Limited
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ACQUISITION METHOD FOR S-PARAMETERS IN MICROWAVE INTRODUCTION MODUL...
- Publication number 20150212127
- Publication date Jul 30, 2015
- TOKYO ELECTRON LIMITED
- Taro Ikeda
- G01 - MEASURING TESTING
Information Patent Application
PLASMA PROCESSING APPARATUS AND WAVE RETARDATION PLATE USED THEREIN
- Publication number 20120180953
- Publication date Jul 19, 2012
- TOKYO ELECTRON LIMITED
- Shigenori Ozaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND COMPUTER STORAGE MEDIUM
- Publication number 20110124202
- Publication date May 26, 2011
- TOKYO ELECTRON LIMITED
- Seiji Matsuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLANAR ANTENNA MEMBER AND PLASMA PROCESSING APPARATUS INCLUDING THE...
- Publication number 20110114021
- Publication date May 19, 2011
- Atsushi Ueda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20100307684
- Publication date Dec 9, 2010
- TOKYO ELECTRON LIMITED
- Ryosaku Ota
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA PROCESSING METHOD AND COMPUTER STORAGE MEDIUM
- Publication number 20100196627
- Publication date Aug 5, 2010
- TOKYO ELECTRON LIMITED
- Seiji Matsuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA OXIDIZING METHOD, PLASMA PROCESSING APPARATUS, AND STORAGE M...
- Publication number 20100015815
- Publication date Jan 21, 2010
- Tokyo Electron Limited
- Toshihiko Shiozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing method and computer storage medium
- Publication number 20070059944
- Publication date Mar 15, 2007
- TOKYO ELECTRON LIMITED
- Seiji Matsuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma processor
- Publication number 20050034815
- Publication date Feb 17, 2005
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS

Hikaru Adachi

Person

Patents Grantslast 30 patents

Acquisition method for S-parameters in microwave introduction modul...

Plasma processing method

Plasma oxidizing method, plasma processing apparatus, and storage m...

Plasma processing method and computer storage medium

Plasma processing method and computer storage medium

Plasma processing apparatus

Patents Applicationslast 30 patents

ACQUISITION METHOD FOR S-PARAMETERS IN MICROWAVE INTRODUCTION MODUL...

PLASMA PROCESSING APPARATUS AND WAVE RETARDATION PLATE USED THEREIN

PLASMA PROCESSING METHOD AND COMPUTER STORAGE MEDIUM

PLANAR ANTENNA MEMBER AND PLASMA PROCESSING APPARATUS INCLUDING THE...

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING METHOD AND COMPUTER STORAGE MEDIUM

PLASMA OXIDIZING METHOD, PLASMA PROCESSING APPARATUS, AND STORAGE M...

Plasma processing method and computer storage medium

Plasma processor