Hikaru Ito

Person

Minato-Ku, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Coating/developing device and method
- Patent number 8,408,158
- Issue date Apr 2, 2013
- Tokyo Electron Limited
- Masami Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus
- Patent number 8,302,556
- Issue date Nov 6, 2012
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus, heat treatment method, and recording medi...
- Patent number 7,947,215
- Issue date May 24, 2011
- Tokyo Electron Limited
- Hikaru Ito
- C21 - METALLURGY OF IRON
Information Patent Grant
Heating apparatus, and coating and developing apparatus
- Patent number 7,797,855
- Issue date Sep 21, 2010
- Tokyo Electron Limited
- Tetsuo Fukuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus
- Patent number 7,793,609
- Issue date Sep 14, 2010
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus, heat treatment method, and recording medi...
- Patent number 7,745,347
- Issue date Jun 29, 2010
- Tokyo Electron Limited
- Hikaru Ito
- C21 - METALLURGY OF IRON
Information Patent Grant
Coating and developing system and coating and developing method
- Patent number 7,281,869
- Issue date Oct 16, 2007
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing system and coating and developing method
- Patent number 7,267,497
- Issue date Sep 11, 2007
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing system and coating and developing method wit...
- Patent number 7,245,348
- Issue date Jul 17, 2007
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing system and coating and developing method
- Patent number 7,241,061
- Issue date Jul 10, 2007
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COATING AND DEVELOPING APPARATUS
- Publication number 20100326353
- Publication date Dec 30, 2010
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS
- Publication number 20100300353
- Publication date Dec 2, 2010
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND RECORDING MEDI...
- Publication number 20100236477
- Publication date Sep 23, 2010
- TOKYO ELECTRON LIMITED
- Hikaru Ito
- C21 - METALLURGY OF IRON
Information Patent Application
HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND RECORDING MEDI...
- Publication number 20070251613
- Publication date Nov 1, 2007
- TOKYO ELECTRON LIMITED
- Hikaru Ito
- C21 - METALLURGY OF IRON
Information Patent Application
Coating and developing apparatus
- Publication number 20070056514
- Publication date Mar 15, 2007
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heating apparatus, and coating and developing apparatus
- Publication number 20070048979
- Publication date Mar 1, 2007
- TOKYO ELECTRON LIMITED
- Tetsuo Fukuoka
- C30 - CRYSTAL GROWTH
Information Patent Application
COATING/DEVELOPING DEVICE AND METHOD
- Publication number 20060201423
- Publication date Sep 14, 2006
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Coating and developing system and coating and developing method
- Publication number 20060165409
- Publication date Jul 27, 2006
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating and developing system and coating and developing method
- Publication number 20060164613
- Publication date Jul 27, 2006
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating and developing system and coating and developing method
- Publication number 20060162646
- Publication date Jul 27, 2006
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating and developing system and coating and developing method
- Publication number 20060162858
- Publication date Jul 27, 2006
- TOKYO ELECTRON LIMITED
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Coating/developing device and method

Coating and developing apparatus

Heat treatment apparatus, heat treatment method, and recording medi...

Heating apparatus, and coating and developing apparatus

Coating and developing apparatus

Heat treatment apparatus, heat treatment method, and recording medi...

Coating and developing system and coating and developing method

Coating and developing system and coating and developing method

Coating and developing system and coating and developing method wit...

Coating and developing system and coating and developing method

Patents Applicationslast 30 patents

COATING AND DEVELOPING APPARATUS

COATING AND DEVELOPING APPARATUS

HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND RECORDING MEDI...

HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND RECORDING MEDI...

Coating and developing apparatus

Heating apparatus, and coating and developing apparatus

COATING/DEVELOPING DEVICE AND METHOD

Coating and developing system and coating and developing method

Coating and developing system and coating and developing method

Coating and developing system and coating and developing method

Coating and developing system and coating and developing method