Hikaru Kamata

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Sendai City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Etching method and device
- Patent number 9,218,983
- Issue date Dec 22, 2015
- Tokyo Electron Limited
- Takashi Dokan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND DEVICE
- Publication number 20140308815
- Publication date Oct 16, 2014
- TOKYO ELECTRON LIMITED
- Takashi Dokan
- H01 - BASIC ELECTRIC ELEMENTS