Hikaru Koyama

Person

Tokorozawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Inspection device
- Patent number 11,276,551
- Issue date Mar 15, 2022
- Hitachi, Ltd.
- Atsuko Shintani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Data analysis system and apparatus for analyzing manufacturing defe...
- Patent number 11,170,332
- Issue date Nov 9, 2021
- Hitachi, Ltd.
- Hikaru Koyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning electron microscope and sample observation method
- Patent number 10,840,060
- Issue date Nov 17, 2020
- HITACHI HIGH-TECH CORPORATION
- Zhaohui Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Search apparatus and search method
- Patent number 10,734,261
- Issue date Aug 4, 2020
- Hitachi, Ltd.
- Takeshi Ohmori
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning electron microscope and sample observation method
- Patent number 9,991,092
- Issue date Jun 5, 2018
- Hitachi High-Technologies Corporation
- Zhaohui Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for scanning and measurement by electron beam
- Patent number 7,655,906
- Issue date Feb 2, 2010
- Hitachi High-Technologies Corporation
- Zhaohui Cheng
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus and inspection method
- Patent number 7,652,248
- Issue date Jan 26, 2010
- Hitachi High-Technologies Corporation
- Hiroshi Makino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern defect inspection method and apparatus thereof
- Patent number 7,547,884
- Issue date Jun 16, 2009
- Hitachi High-Technologies Corporation
- Masaki Hasegawa
- G01 - MEASURING TESTING
Information Patent Grant
Electron microscope application apparatus and sample inspection method
- Patent number 7,501,625
- Issue date Mar 10, 2009
- Hitachi High-Technologies Corporation
- Hikaru Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method and apparatus using charged particle beam
- Patent number 7,276,693
- Issue date Oct 2, 2007
- Hitachi High-Technologies Corporation
- Hikaru Koyama
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and apparatus using charged particle beam
- Patent number 7,019,294
- Issue date Mar 28, 2006
- Hitachi High-Technologies Corporation
- Hikaru Koyama
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
INSURANCE CLAIM PAYMENT REVIEWING SYSTEM, PROGRAM, AND INSURANCE CL...
- Publication number 20250078166
- Publication date Mar 6, 2025
- Hitachi, Ltd
- Sonoko Kimura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ACOUSTIC CIRCUIT BREAKER DIAGNOSIS DEVICE AND METHOD
- Publication number 20240280635
- Publication date Aug 22, 2024
- Hitachi, Ltd
- Takashi ENDO
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
INSPECTION DEVICE
- Publication number 20200365364
- Publication date Nov 19, 2020
- Hitachi, Ltd
- Atsuko SHINTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEARCH APPARATUS AND SEARCH METHOD
- Publication number 20200328101
- Publication date Oct 15, 2020
- Hitachi, Ltd
- Takeshi OHMORI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Data Analysis System and Data Analysis Apparatus
- Publication number 20190164101
- Publication date May 30, 2019
- Hitachi, Ltd
- Hikaru KOYAMA
- G05 - CONTROLLING REGULATING
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD
- Publication number 20180269032
- Publication date Sep 20, 2018
- Zhaohui CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEARCH APPARATUS AND SEARCH METHOD
- Publication number 20180082873
- Publication date Mar 22, 2018
- Hitachi, Ltd
- Takeshi OHMORI
- G01 - MEASURING TESTING
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20150371825
- Publication date Dec 24, 2015
- Hitachi High-Technologies Corporation
- Hiroyuki Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD
- Publication number 20120153145
- Publication date Jun 21, 2012
- Hitachi High-Technologies Corporation
- Zhaohui Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection Apparatus and Inspection Method
- Publication number 20070228276
- Publication date Oct 4, 2007
- HIROSHI MAKINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pattern defect inspection method and apparatus thereof
- Publication number 20070085005
- Publication date Apr 19, 2007
- Hitachi High-Technologies Corporation
- Masaki Hasegawa
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for scanning and measurement by electron beam
- Publication number 20070040118
- Publication date Feb 22, 2007
- Zhaohui Cheng
- G01 - MEASURING TESTING
Information Patent Application
Electron microscope application apparatus and sample inspection method
- Publication number 20060289755
- Publication date Dec 28, 2006
- Hikaru Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection method and apparatus using charged particle beam
- Publication number 20060163480
- Publication date Jul 27, 2006
- Hikaru Koyama
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and apparatus using charged particle beam
- Publication number 20050190310
- Publication date Sep 1, 2005
- Hikaru Koyama
- G01 - MEASURING TESTING

Hikaru Koyama

Person

Patents Grantslast 30 patents

Inspection device

Data analysis system and apparatus for analyzing manufacturing defe...

Scanning electron microscope and sample observation method

Search apparatus and search method

Scanning electron microscope and sample observation method

Method and apparatus for scanning and measurement by electron beam

Inspection apparatus and inspection method

Pattern defect inspection method and apparatus thereof

Electron microscope application apparatus and sample inspection method

Inspection method and apparatus using charged particle beam

Inspection method and apparatus using charged particle beam

Patents Applicationslast 30 patents

INSURANCE CLAIM PAYMENT REVIEWING SYSTEM, PROGRAM, AND INSURANCE CL...

ACOUSTIC CIRCUIT BREAKER DIAGNOSIS DEVICE AND METHOD

INSPECTION DEVICE

SEARCH APPARATUS AND SEARCH METHOD

Data Analysis System and Data Analysis Apparatus

SCANNING ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD

SEARCH APPARATUS AND SEARCH METHOD

PLASMA PROCESSING APPARATUS

SCANNING ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD

Inspection Apparatus and Inspection Method

Pattern defect inspection method and apparatus thereof

Method and apparatus for scanning and measurement by electron beam

Electron microscope application apparatus and sample inspection method

Inspection method and apparatus using charged particle beam

Inspection method and apparatus using charged particle beam