Hikaru NIHEI

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and particle removal method
- Patent number 12,062,557
- Issue date Aug 13, 2024
- Tokyo Electron Limited
- Genichi Nanasaki
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND PARTICLE REMOVAL METHOD
- Publication number 20220199435
- Publication date Jun 23, 2022
- TOKYO ELECTRON LIMITED
- Genichi NANASAKI
- H01 - BASIC ELECTRIC ELEMENTS