Hikaru Nishijima

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Takasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Conical-frustum sputtering target and magnetron sputtering apparatus
- Patent number 4,747,926
- Issue date May 31, 1988
- Hitachi, Ltd.
- Tamotsu Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...