Hikaru Sugita

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for forming resist under layer film, pattern forming method...
- Patent number 8,691,496
- Issue date Apr 8, 2014
- JSR Corporation
- Yousuke Konno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern forming method
- Patent number 8,450,045
- Issue date May 28, 2013
- JSR Corporation
- Hikaru Sugita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern forming method
- Patent number 8,288,073
- Issue date Oct 16, 2012
- JSR Corporation
- Yousuke Konno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming pattern and composition for forming of organic th...
- Patent number 8,173,348
- Issue date May 8, 2012
- JSR Corporation
- Daisuke Shimizu
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Method of forming pattern, composition for forming upper-layer film...
- Patent number 8,119,324
- Issue date Feb 21, 2012
- JSR Corporation
- Hikaru Sugita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Composition for forming lower layer film and pattern forming method
- Patent number 7,749,681
- Issue date Jul 6, 2010
- JSR Corporation
- Nakaatsu Yoshimura
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Acenaphthylene derivative, polymer, and antireflection film-forming...
- Patent number 7,037,994
- Issue date May 2, 2006
- JSR Corporation
- Hikaru Sugita
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Composition for resist underlayer film and method for producing the...
- Patent number 6,576,393
- Issue date Jun 10, 2003
- JSR Corporation
- Hikaru Sugita
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING RESIST UNDER LAYER FILM, PATTERN FORMING METHOD...
- Publication number 20130004900
- Publication date Jan 3, 2013
- JSR Corporation
- Yousuke Konno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMING METHOD
- Publication number 20120122036
- Publication date May 17, 2012
- JSR Corporation
- Hikaru Sugita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF FORMING PATTERN AND COMPOSITION FOR FORMING OF ORGANIC TH...
- Publication number 20100233635
- Publication date Sep 16, 2010
- JSR Corporation
- Daisuke Shimizu
- C07 - ORGANIC CHEMISTRY
Information Patent Application
METHOD FOR RESIST UNDER LAYER FILM FORMATION, COMPOSITION FOR RESIS...
- Publication number 20100028802
- Publication date Feb 4, 2010
- JSR Corporation
- Yousuke Konno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF FORMING PATTERN, COMPOSITION FOR FORMING UPPER-LAYER FILM...
- Publication number 20090311622
- Publication date Dec 17, 2009
- JSR Corporation
- Hikaru Sugita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPOSITION FOR FORMING LOWER LAYER FILM AND PATTERN FORMING METHOD
- Publication number 20090098486
- Publication date Apr 16, 2009
- JSR Corporation
- Nakaatsu Yoshimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Acenaphthylene derivative, polymer, and antireflection film-forming...
- Publication number 20040034155
- Publication date Feb 19, 2004
- Hikaru Sugita
- C07 - ORGANIC CHEMISTRY

Hikaru Sugita

Person

Patents Grantslast 30 patents

Method for forming resist under layer film, pattern forming method...

Pattern forming method

Pattern forming method

Method of forming pattern and composition for forming of organic th...

Method of forming pattern, composition for forming upper-layer film...

Composition for forming lower layer film and pattern forming method

Acenaphthylene derivative, polymer, and antireflection film-forming...

Composition for resist underlayer film and method for producing the...

Patents Applicationslast 30 patents

METHOD FOR FORMING RESIST UNDER LAYER FILM, PATTERN FORMING METHOD...

PATTERN FORMING METHOD

METHOD OF FORMING PATTERN AND COMPOSITION FOR FORMING OF ORGANIC TH...

METHOD FOR RESIST UNDER LAYER FILM FORMATION, COMPOSITION FOR RESIS...

METHOD OF FORMING PATTERN, COMPOSITION FOR FORMING UPPER-LAYER FILM...

COMPOSITION FOR FORMING LOWER LAYER FILM AND PATTERN FORMING METHOD

Acenaphthylene derivative, polymer, and antireflection film-forming...