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Hikoichiro Sasaki
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Nirasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus
Patent number
10,115,567
Issue date
Oct 30, 2018
Tokyo Electron Limited
Taichi Hirano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching method and computer-readable storage medium
Patent number
8,609,547
Issue date
Dec 17, 2013
Tokyo Electron Limited
Kosei Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching method and computer-readable storage medium
Patent number
8,129,282
Issue date
Mar 6, 2012
Tokyo Electron Limited
Kosei Ueda
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20230326718
Publication date
Oct 12, 2023
TOKYO ELECTRON LIMITED
Hikoichiro SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20220139719
Publication date
May 5, 2022
TOKYO ELECTRON LIMITED
Koki CHINO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20160079037
Publication date
Mar 17, 2016
TOKYO ELECTRON LIMITED
Taichi Hirano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD AND COMPUTER-READABLE STORAGE MEDIUM
Publication number
20120149206
Publication date
Jun 14, 2012
TOKYO ELECTRON LIMITED
Kosei Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD AND COMPUTER-READABLE STORAGE MEDIUM
Publication number
20080020583
Publication date
Jan 24, 2008
TOKYO ELECTRON LIMITED
Kosei Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD AND COMPUTER-READABLE STORAGE MEDIUM
Publication number
20080014755
Publication date
Jan 17, 2008
TOKYO ELECTRON LIMITED
Nobuhiro WADA
H01 - BASIC ELECTRIC ELEMENTS