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Hilko Dirk BOS
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Utrecht, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Metrology method and associated computer product
Patent number
12,105,432
Issue date
Oct 1, 2024
ASML Netherlands B.V.
Narjes Javaheri
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of determining a value of a parameter of interest of a patte...
Patent number
11,181,828
Issue date
Nov 23, 2021
ASML Netherlands B.V.
Patrick Warnaar
G01 - MEASURING TESTING
Information
Patent Grant
Method of measuring a parameter of a lithographic process, metrolog...
Patent number
11,099,489
Issue date
Aug 24, 2021
ASML Netherlands B.V.
Hugo Augustinus Joseph Cramer
G01 - MEASURING TESTING
Information
Patent Grant
Method of determining a value of a parameter of interest, method of...
Patent number
10,795,269
Issue date
Oct 6, 2020
ASML Netherlands B.V.
Zili Zhou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of measuring asymmetry, inspection apparatus, lithographic s...
Patent number
9,786,044
Issue date
Oct 10, 2017
ASML Netherlands B.V.
Andreas Fuchs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
A SUBSTRATE COMPRISING A TARGET ARRANGEMENT, AND ASSOCIATED AT LEAS...
Publication number
20230176491
Publication date
Jun 8, 2023
ASML NETHERLANDS B.V.
Olger Victor ZWIER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METROLOGY METHOD AND ASSOCIATED COMPUTER PRODUCT
Publication number
20220252990
Publication date
Aug 11, 2022
ASML Netherlands B,V.
Narjes JAVAHERI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF DETERMINING A VALUE OF A PARAMETER OF INTEREST OF A PATTE...
Publication number
20200133140
Publication date
Apr 30, 2020
ASML NETHERLANDS B.V.
Patrick WARNAAR
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method Of Determining A Value Of A Parameter Of Interest, Method Of...
Publication number
20190129316
Publication date
May 2, 2019
ASML NETHERLANDS B.V.
Zili ZHOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF MEASURING ASYMMETRY, INSPECTION APPARATUS, LITHOGRAPHIC S...
Publication number
20160180517
Publication date
Jun 23, 2016
ASML NETHERLANDS B.V.
Andreas FUCHS
G06 - COMPUTING CALCULATING COUNTING