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Hilton F. Glavish
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Salem, MA, US
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last 30 patents
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Patent Grant
Ion beam lithography
Patent number
4,985,634
Issue date
Jan 15, 1991
Oesterreichische Investitionskredit Aktiengesellschaft and Ionen Mikrofabrica...
Gerhard Stengl
B82 - NANO-TECHNOLOGY
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Patent Grant
Method and apparatus for image alignment in ion lithography
Patent number
4,967,088
Issue date
Oct 30, 1990
Oesterreichische Investitionskredit Aktiengesellschaft
Gerhard Stengl
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Arrangement for stabilizing an irradiated mask
Patent number
4,916,322
Issue date
Apr 10, 1990
Osterreichische Investitionskredit Aktiengesellschaft
Hilton F. Glavish
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY