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Himanshu Pokharrna
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San Jose, CA, US
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last 30 patents
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Patent Grant
Method for removing residue from substrate processing chamber exhau...
Patent number
6,255,222
Issue date
Jul 3, 2001
Applied Materials, Inc.
Li-Qun Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...