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Hing Ho Au
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Singapore, SG
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last 30 patents
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Patent Grant
Method for depositing a very high phosphorus doped silicon oxide film
Patent number
6,893,983
Issue date
May 17, 2005
TECH Semiconductor Singapore Pte Ltd.
Jian Sun
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...