Hiraku MURAKAMI

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of cleaning plasma processing apparatus
- Patent number 10,553,409
- Issue date Feb 4, 2020
- Tokyo Electron Limited
- Hiraku Murakami
- B08 - CLEANING
Information Patent Grant
Plasma processing apparatus and method for processing object
- Patent number 10,264,630
- Issue date Apr 16, 2019
- Tokyo Electron Limited
- Ryoichi Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method
- Patent number 9,818,582
- Issue date Nov 14, 2017
- Tokyo Electron Limited
- Hiraku Murakami
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING APPARATUS AND METHOD FOR CONTROLLING PROCESSING APPARATUS
- Publication number 20190318914
- Publication date Oct 17, 2019
- TOKYO ELECTRON LIMITED
- Naohiko OKUNISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING PLASMA PROCESSING APPARATUS
- Publication number 20180330930
- Publication date Nov 15, 2018
- TOKYO ELECTRON LIMITED
- Hiraku MURAKAMI
- B08 - CLEANING
Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20160372308
- Publication date Dec 22, 2016
- TOKYO ELECTRON LIMITED
- Hiraku MURAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD FOR PROCESSING OBJECT
- Publication number 20150245460
- Publication date Aug 27, 2015
- TOKYO ELECTRON LIMITED
- Ryoichi YOSHIDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR