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Tokyo, JP
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last 30 patents
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Patent Grant
Aberration corrector and charged particle beam apparatus using the...
Patent number
9,287,084
Issue date
Mar 15, 2016
Hitachi High-Technologies Corporation
Zhaohui Cheng
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ABERRATION CORRECTOR AND CHARGED PARTICLE BEAM APPARATUS USING THE...
Publication number
20150248944
Publication date
Sep 3, 2015
Hitachi High-Technologies Corporation
Zhaohui Cheng
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING