Hiroaki CHIHAYA

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and abnormality detection method
- Patent number 12,170,217
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Hiroaki Chihaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film thickness measuring apparatus and film thickness measuring met...
- Patent number 11,939,665
- Issue date Mar 26, 2024
- Tokyo Electron Limted
- Masato Shinada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming system, magnetization characteristic measuring device,...
- Patent number 11,715,671
- Issue date Aug 1, 2023
- Tokyo Electron Limited
- Hiroaki Chihaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming system and method for forming film on substrate
- Patent number 11,542,592
- Issue date Jan 3, 2023
- Tokyo Electron Limited
- Masato Shinada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,748,750
- Issue date Aug 18, 2020
- Tokyo Electron Limited
- Hiroaki Chihaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS, PROCESSING CONDITION DETERMINATION METHOD,...
- Publication number 20220415634
- Publication date Dec 29, 2022
- TOKYO ELECTRON LIMITED
- Kenichi Imakita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND ABNORMALITY DETECTION METHOD
- Publication number 20220285197
- Publication date Sep 8, 2022
- TOKYO ELECTRON LIMITED
- Hiroaki CHIHAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND ABNORMALITY DETECTION METHOD
- Publication number 20220285182
- Publication date Sep 8, 2022
- TOKYO ELECTRON LIMITED
- Hiroaki CHIHAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOLDER TEMPERATURE DETECTION METHOD, HOLDER MONITORING METHOD AND S...
- Publication number 20220236202
- Publication date Jul 28, 2022
- TOKYO ELECTRON LIMITED
- Einstein Noel ABARRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR SUBSTRATE PROCESSING
- Publication number 20220220606
- Publication date Jul 14, 2022
- TOKYO ELECTRON LIMITED
- Tamaki TAKEYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM THICKNESS MEASURING APPARATUS AND FILM THICKNESS MEASURING MET...
- Publication number 20210285096
- Publication date Sep 16, 2021
- TOKYO ELECTRON LIMITED
- Masato SHINADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING SYSTEM, MAGNETIZATION CHARACTERISTIC MEASURING DEVICE,...
- Publication number 20210082777
- Publication date Mar 18, 2021
- TOKYO ELECTRON LIMITED
- Hiroaki CHIHAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING SYSTEM AND METHOD FOR FORMING FILM ON SUBSTRATE
- Publication number 20190252165
- Publication date Aug 15, 2019
- TOKYO ELECTRON LIMITED
- Masato SHINADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190172690
- Publication date Jun 6, 2019
- TOKYO ELECTRON LIMITED
- Hiroaki CHIHAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hiroaki CHIHAYA

Person

Patents Grantslast 30 patents

Substrate processing apparatus and abnormality detection method

Film thickness measuring apparatus and film thickness measuring met...

Film forming system, magnetization characteristic measuring device,...

Film forming system and method for forming film on substrate

Substrate processing apparatus

Patents Applicationslast 30 patents

FILM FORMING APPARATUS, PROCESSING CONDITION DETERMINATION METHOD,...

SUBSTRATE PROCESSING APPARATUS AND ABNORMALITY DETECTION METHOD

SUBSTRATE PROCESSING APPARATUS AND ABNORMALITY DETECTION METHOD

HOLDER TEMPERATURE DETECTION METHOD, HOLDER MONITORING METHOD AND S...

METHOD AND DEVICE FOR SUBSTRATE PROCESSING

FILM THICKNESS MEASURING APPARATUS AND FILM THICKNESS MEASURING MET...

FILM FORMING SYSTEM, MAGNETIZATION CHARACTERISTIC MEASURING DEVICE,...

FILM FORMING SYSTEM AND METHOD FOR FORMING FILM ON SUBSTRATE

SUBSTRATE PROCESSING APPARATUS