Hiroaki Inadomi

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,057,326
- Issue date Aug 6, 2024
- Tokyo Electron Limited
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and method for supplying processing fluid
- Patent number 11,735,439
- Issue date Aug 22, 2023
- Tokyo Electron Limited
- Yasuo Kiyohara
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,688,613
- Issue date Jun 27, 2023
- Tokyo Electron Limited
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and method for supplying processing fluid
- Patent number 11,482,427
- Issue date Oct 25, 2022
- Tokyo Electron Limited
- Yasuo Kiyohara
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus and cleaning method of substrate processing appa...
- Patent number 11,295,965
- Issue date Apr 5, 2022
- Tokyo Electron Limited
- Kohei Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus having processing block including li...
- Patent number 11,139,181
- Issue date Oct 5, 2021
- Tokyo Electron Limited
- Hiroaki Inadomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Liquid processing method, substrate processing apparatus, and stora...
- Patent number 10,867,814
- Issue date Dec 15, 2020
- Tokyo Electron Limited
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus having cooling member
- Patent number 10,679,845
- Issue date Jun 9, 2020
- Tokyo Electron Limited
- Hiroaki Inadomi
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,593,571
- Issue date Mar 17, 2020
- Tokyo Electron Limited
- Hiroaki Inadomi
- B08 - CLEANING
Information Patent Grant
High-pressure container, substrate processing apparatus, and method...
- Patent number 10,207,349
- Issue date Feb 19, 2019
- Tokyo Electron Limited
- Kazuyuki Mitsuoka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Processing apparatus
- Patent number 9,496,158
- Issue date Nov 15, 2016
- Tokyo Electron Limited
- Mikio Nakashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,449,857
- Issue date Sep 20, 2016
- Tokyo Electron Limited
- Hiroaki Inadomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate heating apparatus and method and coating and developing s...
- Patent number 8,814,563
- Issue date Aug 26, 2014
- Tokyo Electron Limited
- Shinichi Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Ultrasonic cleaning apparatus, ultrasonic cleaning method, and stor...
- Patent number 8,567,417
- Issue date Oct 29, 2013
- Tokyo Electron Limited
- Yuji Kamikawa
- B08 - CLEANING
Information Patent Grant
Apparatus and method for heating substrate and coating and developi...
- Patent number 8,237,092
- Issue date Aug 7, 2012
- Tokyo Electron Limited
- Shinichi Hayashi
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Apparatus and method for heating substrate and coating and developi...
- Patent number 8,080,765
- Issue date Dec 20, 2011
- Tokyo Electron Limited
- Shinichi Hayashi
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Apparatus and method for heating substrate and coating and developi...
- Patent number 7,812,285
- Issue date Oct 12, 2010
- Tokyo Electron Limited
- Shinichi Hayashi
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate heating apparatus and method and coating and developing s...
- Patent number 7,780,438
- Issue date Aug 24, 2010
- Tokyo Electron Limited
- Shinichi Hayashi
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Heating device and heating method
- Patent number 7,758,340
- Issue date Jul 20, 2010
- Tokyo Electron Limited
- Masami Akimoto
- F27 - FURNACES KILNS OVENS RETORTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240339339
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230402303
- Publication date Dec 14, 2023
- TOKYO ELECTRON LIMITED
- Tsunenaga Nakashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD FOR SUPPLYING PROCESSING FLUID
- Publication number 20230028053
- Publication date Jan 26, 2023
- TOKYO ELECTRON LIMITED
- Yasuo Kiyohara
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220319876
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Shinichi Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220208567
- Publication date Jun 30, 2022
- TOKYO ELECTRON LIMITED
- Mikio Nakashima
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220044945
- Publication date Feb 10, 2022
- TOKYO ELECTRON LIMITED
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220044944
- Publication date Feb 10, 2022
- TOKYO ELECTRON LIMITED
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200168482
- Publication date May 28, 2020
- TOKYO ELECTRON LIMITED
- Hiroaki Inadomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD FOR SUPPLYING PROCESSING FLUID
- Publication number 20200098594
- Publication date Mar 26, 2020
- TOKYO ELECTRON LIMITED
- Yasuo Kiyohara
- B08 - CLEANING
Information Patent Application
CLEANING APPARATUS AND CLEANING METHOD OF SUBSTRATE PROCESSING APPA...
- Publication number 20190148182
- Publication date May 16, 2019
- TOKYO ELECTRON LIMITED
- Kohei YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190103291
- Publication date Apr 4, 2019
- TOKYO ELECTRON LIMITED
- Hiroaki Inadomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170287742
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Hiroaki Inadomi
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20170256398
- Publication date Sep 7, 2017
- TOKYO ELECTRON LIMITED
- Hiroaki Inadomi
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND STORA...
- Publication number 20170236729
- Publication date Aug 17, 2017
- TOKYO ELECTRON LIMITED
- Yosuke Kawabuchi
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160336201
- Publication date Nov 17, 2016
- TOKYO ELECTRON LIMITED
- Hiroaki INADOMI
- B08 - CLEANING
Information Patent Application
HIGH-PRESSURE CONTAINER, SUBSTRATE PROCESSING APPARATUS, AND METHOD...
- Publication number 20140145390
- Publication date May 29, 2014
- TOKYO ELECTRON LIMITED
- Kazuyuki Mitsuoka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130327363
- Publication date Dec 12, 2013
- Hiroaki Inadomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS
- Publication number 20120266925
- Publication date Oct 25, 2012
- Mikio Nakashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRASONIC CLEANING APPARATUS, ULTRASONIC CLEANING METHOD, AND STOR...
- Publication number 20110079240
- Publication date Apr 7, 2011
- TOKYO ELECTRON LIMITED
- Yuji KAMIKAWA
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR HEATING SUBSTRATE AND COATING AND DEVELOPI...
- Publication number 20100330815
- Publication date Dec 30, 2010
- TOKYO ELECTRON LIMITED
- Shinichi Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR HEATING SUBSTRATE AND COATING AND DEVELOPI...
- Publication number 20100326351
- Publication date Dec 30, 2010
- TOKYO ELECTRON LIMITED
- Shinichi Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HEATING APPARATUS AND METHOD AND COATING AND DEVELOPING S...
- Publication number 20100255204
- Publication date Oct 7, 2010
- TOKYO ELECTRON LIMITED
- Shinichi Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HEATING DEVICE AND HEATING METHOD
- Publication number 20070160947
- Publication date Jul 12, 2007
- TOKYO ELECTRON LIMITED
- Masami AKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate heating apparatus and method and coating and developing s...
- Publication number 20060252000
- Publication date Nov 9, 2006
- TOKYO ELECTRON LIMITED
- Shinichi Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and method for heating substrate and coating and developi...
- Publication number 20060234178
- Publication date Oct 19, 2006
- TOKYO ELECTRON LIMITED
- Shinichi Hayashi
- H01 - BASIC ELECTRIC ELEMENTS

Hiroaki Inadomi

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing system and method for supplying processing fluid

Substrate processing apparatus and substrate processing method

Substrate processing system and method for supplying processing fluid

Cleaning apparatus and cleaning method of substrate processing appa...

Substrate processing apparatus having processing block including li...

Liquid processing method, substrate processing apparatus, and stora...

Substrate processing apparatus having cooling member

Substrate processing apparatus

High-pressure container, substrate processing apparatus, and method...

Processing apparatus

Substrate processing apparatus and substrate processing method

Substrate heating apparatus and method and coating and developing s...

Ultrasonic cleaning apparatus, ultrasonic cleaning method, and stor...

Apparatus and method for heating substrate and coating and developi...

Apparatus and method for heating substrate and coating and developi...

Apparatus and method for heating substrate and coating and developi...

Substrate heating apparatus and method and coating and developing s...

Heating device and heating method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM AND METHOD FOR SUPPLYING PROCESSING FLUID

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM AND METHOD FOR SUPPLYING PROCESSING FLUID

CLEANING APPARATUS AND CLEANING METHOD OF SUBSTRATE PROCESSING APPA...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

LIQUID PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND STORA...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

HIGH-PRESSURE CONTAINER, SUBSTRATE PROCESSING APPARATUS, AND METHOD...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

PROCESSING APPARATUS

ULTRASONIC CLEANING APPARATUS, ULTRASONIC CLEANING METHOD, AND STOR...

APPARATUS AND METHOD FOR HEATING SUBSTRATE AND COATING AND DEVELOPI...

APPARATUS AND METHOD FOR HEATING SUBSTRATE AND COATING AND DEVELOPI...

SUBSTRATE HEATING APPARATUS AND METHOD AND COATING AND DEVELOPING S...

HEATING DEVICE AND HEATING METHOD

Substrate heating apparatus and method and coating and developing s...

Apparatus and method for heating substrate and coating and developi...