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Hiroaki Inoue
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Shizuoka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Radical etching apparatus and method
Patent number
9,216,609
Issue date
Dec 22, 2015
ULVAC, Inc.
Hiroaki Inoue
B44 - DECORATIVE ARTS
Information
Patent Grant
Method for surface treating semiconductor
Patent number
8,097,541
Issue date
Jan 17, 2012
F.T.L. Co., Ltd.
Mikio Takagi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ETCHING DEVICE AND ETCHING METHOD
Publication number
20240242938
Publication date
Jul 18, 2024
ULVAC, Inc.
Kazuhiko Tonari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RADICAL ETCHING APPARATUS AND METHOD
Publication number
20130306599
Publication date
Nov 21, 2013
Ulvac, Inc.
Hiroaki Inoue
B44 - DECORATIVE ARTS
Information
Patent Application
Method for Surface Treating Semiconductor
Publication number
20090117747
Publication date
May 7, 2009
Mikio Takagi
H01 - BASIC ELECTRIC ELEMENTS