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Hiroaki Ishizuka
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Kurokawa-gun, JP
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last 30 patents
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Patent Grant
Etching method of multilayer film
Patent number
8,895,454
Issue date
Nov 25, 2014
Tokyo Electron Limited
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
ETCHING METHOD OF MULTILAYER FILM
Publication number
20150072534
Publication date
Mar 12, 2015
TOKYO ELECTRON LIMITED
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
ETCHING METHOD OF MULTILAYER FILM
Publication number
20140206199
Publication date
Jul 24, 2014
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS