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Hiroaki IWASAWA
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Susono-shi, JP
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last 30 patents
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Patent Grant
Manufacturing method and manufacturing apparatus of device
Patent number
8,883,632
Issue date
Nov 11, 2014
Ulvac, Inc.
Youhei Endo
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
MANUFACTURING METHOD AND MANUFACTURING APPARATUS OF DEVICE
Publication number
20130178059
Publication date
Jul 11, 2013
ULVAC, Inc.
Youhei ENDO
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Self-ionized sputtering apparatus
Publication number
20100230280
Publication date
Sep 16, 2010
ULVAC, Inc.
Shinya Nakamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...