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Hiroaki Kawaguchi

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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing device
    • Patent number 7,180,035
    • Issue date Feb 20, 2007
    • Tokyo Electron Limited
    • Norihiro Ito
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Substrate processing device
    • Publication number 20060110143
    • Publication date May 25, 2006
    • TOKYO ELECTRON LIMITED
    • Norihiro Ito
    • H01 - BASIC ELECTRIC ELEMENTS