Hiroaki KAWASAKI

Follow

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Integration of a self-forming barrier layer and a ruthenium metal l...
- Patent number 10,157,784
- Issue date Dec 18, 2018
- Tokyo Electron Limited
- Kai-Hung Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating semiconductor device including a substrate ha...
- Patent number 9,390,972
- Issue date Jul 12, 2016
- Tokyo Electron Limited
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MANUFACTURING METHOD OF NICKEL WIRING
- Publication number 20180090446
- Publication date Mar 29, 2018
- TOKYO ELECTRON LIMITED
- Hiroaki KAWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATION OF A SELF-FORMING BARRIER LAYER AND A RUTHENIUM METAL...
- Publication number 20170236752
- Publication date Aug 17, 2017
- TOKYO ELECTRON LIMITED
- Kai-Hung L. Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Fabricating Semiconductor Device Including A Substrate Ha...
- Publication number 20150270166
- Publication date Sep 24, 2015
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AN...
- Publication number 20140374904
- Publication date Dec 25, 2014
- Kenji MATSUMOTO
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
THIN FILM FORMING METHOD
- Publication number 20130252417
- Publication date Sep 26, 2013
- TOKYO ELECTRON LIMITED
- Tadahiro ISHIZAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...