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Hiroaki KITAGAWA
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Kyoto, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
10,619,894
Issue date
Apr 14, 2020
SCREEN Holdings Co., Ltd.
Hiroaki Kitagawa
B08 - CLEANING
Information
Patent Grant
Substrate treating apparatus and substrate treating method
Patent number
10,153,181
Issue date
Dec 11, 2018
SCREEN Holdings Co., Ltd.
Yuta Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
10,065,218
Issue date
Sep 4, 2018
SCREEN Holdings Co., Ltd.
Hiroaki Kitagawa
B08 - CLEANING
Information
Patent Grant
Apparatus for and method of processing substrate
Patent number
9,922,848
Issue date
Mar 20, 2018
SCREEN Holdings Co., Ltd.
Katsuhiko Miya
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
9,111,966
Issue date
Aug 18, 2015
SCREEN Holdings Co., Ltd.
Hiroaki Kitagawa
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20180345328
Publication date
Dec 6, 2018
SCREEN Holdings Co., Ltd.
Hiroaki KITAGAWA
B08 - CLEANING
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
Publication number
20170345683
Publication date
Nov 30, 2017
SCREEN Holdings Co., Ltd.
Yuta SASAKI
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20170213725
Publication date
Jul 27, 2017
SCREEN Holdings Co., Ltd.
Hiroaki KITAGAWA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20160279679
Publication date
Sep 29, 2016
SCREEN Holdings Co., Ltd.
Hiroaki KITAGAWA
B08 - CLEANING
Information
Patent Application
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
Publication number
20150255315
Publication date
Sep 10, 2015
Dainippon Screen Mfg. Co., Ltd.
Katsuhiko MIYA
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20130074873
Publication date
Mar 28, 2013
Hiroaki KITAGAWA
B08 - CLEANING
Information
Patent Application
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
Publication number
20120073599
Publication date
Mar 29, 2012
Katsuhiko MIYA
B08 - CLEANING