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Hiroaki Kusa
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Polishing apparatus and polishing method
Patent number
10,166,647
Issue date
Jan 1, 2019
Ebara Corporation
Tamami Takahashi
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
10,137,552
Issue date
Nov 27, 2018
Ebara Corporation
Kazuaki Maeda
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
9,649,739
Issue date
May 16, 2017
Ebara Corporation
Kazuaki Maeda
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus and polishing method
Patent number
9,517,544
Issue date
Dec 13, 2016
Ebara Corporation
Tamami Takahashi
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
9,138,854
Issue date
Sep 22, 2015
Ebara Corporation
Kazuaki Maeda
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus and polishing method
Patent number
8,986,069
Issue date
Mar 24, 2015
Ebara Corporation
Tamami Takahashi
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
8,771,038
Issue date
Jul 8, 2014
Ebara Corporation
Toshifumi Kimba
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus and polishing method
Patent number
8,506,362
Issue date
Aug 13, 2013
Kabushiki Kaisha Toshiba
Dai Fukushima
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate holder and substrate holding method
Patent number
8,506,363
Issue date
Aug 13, 2013
Ebara Corporation
Tamami Takahashi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate processing apparatus
Patent number
8,414,355
Issue date
Apr 9, 2013
Ebara Corporation
Toshifumi Kimba
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus and polishing method
Patent number
8,187,055
Issue date
May 29, 2012
Ebara Corporation
Tamami Takahashi
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus, polishing method, and processing apparatus
Patent number
8,047,896
Issue date
Nov 1, 2011
Ebara Corporation
Tamami Takahashi
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus and polishing method
Patent number
7,976,361
Issue date
Jul 12, 2011
Ebara Corporation
Tamami Takahashi
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
POLISHING APPARATUS
Publication number
20170216989
Publication date
Aug 3, 2017
EBARA CORPORATION
Kazuaki Maeda
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS AND POLISHING METHOD
Publication number
20170072528
Publication date
Mar 16, 2017
EBARA CORPORATION
Tamami TAKAHASHI
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS
Publication number
20150352682
Publication date
Dec 10, 2015
EBARA CORPORATION
Kazuaki Maeda
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS AND POLISHING METHOD
Publication number
20150104620
Publication date
Apr 16, 2015
EBARA CORPORATION
Tamami TAKAHASHI
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS AND POLISHING METHOD
Publication number
20120208437
Publication date
Aug 16, 2012
Tamami TAKAHASHI
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS
Publication number
20110034106
Publication date
Feb 10, 2011
Toshifumi Kimba
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS AND POLISHING METHOD
Publication number
20110003537
Publication date
Jan 6, 2011
Dai Fukushima
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS
Publication number
20110003540
Publication date
Jan 6, 2011
Tamami Takahashi
B24 - GRINDING POLISHING
Information
Patent Application
Substrate holder and substrate holding method
Publication number
20100267317
Publication date
Oct 21, 2010
EBARA CORPORATION
Tamami Takahashi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Substrate processing apparatus
Publication number
20100022166
Publication date
Jan 28, 2010
EBARA CORPORATION
Toshifumi Kimba
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS, POLISHING METHOD, AND PROCESSING APPARATUS
Publication number
20090325465
Publication date
Dec 31, 2009
Tamami Takahashi
B24 - GRINDING POLISHING
Information
Patent Application
Polishing apparatus
Publication number
20090227189
Publication date
Sep 10, 2009
EBARA CORPORATION
Kazuaki Maeda
B24 - GRINDING POLISHING
Information
Patent Application
Polishing apparatus and polishing method
Publication number
20090142992
Publication date
Jun 4, 2009
EBARA CORPORATION
Tamami Takahashi
B24 - GRINDING POLISHING
Information
Patent Application
Polishing apparatus and polishing method
Publication number
20090004952
Publication date
Jan 1, 2009
Tamami Takahashi
B24 - GRINDING POLISHING