Hiroaki Mochizuki

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,705,374
- Issue date Jul 18, 2023
- Tokyo Electron Limited
- Joji Takayoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 10,748,779
- Issue date Aug 18, 2020
- Tokyo Electron Limited
- Hiroaki Mochizuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anomaly detection method and semiconductor manufacturing apparatus
- Patent number 10,418,289
- Issue date Sep 17, 2019
- Tokyo Electron Limited
- Tatsuya Ogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lot processing start determining method and control unit
- Patent number 8,463,415
- Issue date Jun 11, 2013
- Tokyo Electron Limited
- Hiroaki Mochizuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control device and control method of plasma processing system, and...
- Patent number 8,452,455
- Issue date May 28, 2013
- Tokyo Electron Limited
- Hiroaki Mochizuki
- G05 - CONTROLLING REGULATING
Information Patent Grant
Cleaning method for substrate processing system, storage medium, an...
- Patent number 8,382,910
- Issue date Feb 26, 2013
- Tokyo Electron Limited
- Masahiro Numakura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate transfer method adopte...
- Patent number 8,145,339
- Issue date Mar 27, 2012
- Tokyo Electron Limited
- Kiyohito Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control device and control method of plasma processing system, and...
- Patent number 8,055,368
- Issue date Nov 8, 2011
- Tokyo Electron Limited
- Kiyohito Iijima
- G05 - CONTROLLING REGULATING
Information Patent Grant
Troubleshooting support device, troubleshooting support method and...
- Patent number 7,849,363
- Issue date Dec 7, 2010
- Tokyo Electron Limited
- Hiroaki Mochizuki
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method for recovering object to be treated after interruption
- Patent number 6,162,010
- Issue date Dec 19, 2000
- Tokyo Electron Limited
- Shigeru Ishizawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210313238
- Publication date Oct 7, 2021
- TOKYO ELECTRON LIMITED
- Joji TAKAYOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20190198335
- Publication date Jun 27, 2019
- TOKYO ELECTRON LIMITED
- Hiroaki MOCHIZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANOMALY DETECTION METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20180068906
- Publication date Mar 8, 2018
- TOKYO ELECTRON LIMITED
- Tatsuya OGI
- G01 - MEASURING TESTING
Information Patent Application
LOT PROCESSING START DETERMINING METHOD AND CONTROL UNIT
- Publication number 20100280643
- Publication date Nov 4, 2010
- TOKYO ELECTRON LIMITED
- Hiroaki Mochizuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD AND STORAGE MEDIUM
- Publication number 20100089423
- Publication date Apr 15, 2010
- TOKYO ELECTRON LIMITED
- Kiyohito IIJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL DEVICE AND CONTROL METHOD OF PLASMA PROCESSING SYSTEM, AND...
- Publication number 20100010658
- Publication date Jan 14, 2010
- TOKYO ELECTRON LIMITED
- Kiyohito IIJIMA
- G05 - CONTROLLING REGULATING
Information Patent Application
CONTROL DEVICE AND CONTROL METHOD OF PLASMA PROCESSING SYSTEM, AND...
- Publication number 20100004785
- Publication date Jan 7, 2010
- TOKYO ELECTRON LIMITED
- Hiroaki MOCHIZUKI
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD ADOPTE...
- Publication number 20090269171
- Publication date Oct 29, 2009
- TOKYO ELECTRON LIMITED
- Kiyohito IIJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD FOR SUBSTRATE PROCESSING SYSTEM, STORAGE MEDIUM, AN...
- Publication number 20090229635
- Publication date Sep 17, 2009
- TOKYO ELECTRON LIMITED
- Masahiro NUMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TROUBLESHOOTING SUPPORT DEVICE, TROUBLESHOOTING SUPPORT METHOD AND...
- Publication number 20080178042
- Publication date Jul 24, 2008
- TOKYO ELECTRON LIMITED
- Hiroaki MOCHIZUKI
- G05 - CONTROLLING REGULATING

Hiroaki Mochizuki

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Substrate processing method

Anomaly detection method and semiconductor manufacturing apparatus

Lot processing start determining method and control unit

Control device and control method of plasma processing system, and...

Cleaning method for substrate processing system, storage medium, an...

Substrate processing apparatus and substrate transfer method adopte...

Control device and control method of plasma processing system, and...

Troubleshooting support device, troubleshooting support method and...

Method for recovering object to be treated after interruption

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD

ANOMALY DETECTION METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS

LOT PROCESSING START DETERMINING METHOD AND CONTROL UNIT

CLEANING METHOD AND STORAGE MEDIUM

CONTROL DEVICE AND CONTROL METHOD OF PLASMA PROCESSING SYSTEM, AND...

CONTROL DEVICE AND CONTROL METHOD OF PLASMA PROCESSING SYSTEM, AND...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD ADOPTE...

CLEANING METHOD FOR SUBSTRATE PROCESSING SYSTEM, STORAGE MEDIUM, AN...

TROUBLESHOOTING SUPPORT DEVICE, TROUBLESHOOTING SUPPORT METHOD AND...