Hiroaki Narushima

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Mask-holding apparatus for a light exposure apparatus and related s...
- Patent number 6,888,621
- Issue date May 3, 2005
- Nikon Corporation
- Yasuo Araki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus including non-containing gas bearings and microlith...
- Patent number 6,583,597
- Issue date Jun 24, 2003
- Nikon Corporation
- Keiichi Tanaka
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Illuminance meter, illuminance measuring method and exposure apparatus
- Patent number 6,549,277
- Issue date Apr 15, 2003
- Nikon Corporation
- Hiroaki Narushima
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Shock-absorber units for use in a vacuum chamber for braking runawa...
- Publication number 20040075201
- Publication date Apr 22, 2004
- NIKON CORPORATION
- Yasushi Yoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask-holding apparatus for a light exposure apparatus and related s...
- Publication number 20030197841
- Publication date Oct 23, 2003
- Nikon Corporation
- Yasuo Araki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask-holding apparatus for a light exposure apparatus and related s...
- Publication number 20030179354
- Publication date Sep 25, 2003
- Nikon Corporation
- Yasuo Araki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage devices exhibiting reduced deformation, and microlithography...
- Publication number 20030178579
- Publication date Sep 25, 2003
- NIKON CORPORATION
- Keiichi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus including non-containing gas bearings and microlith...
- Publication number 20020070699
- Publication date Jun 13, 2002
- NIKON CORPORATION
- Keiichi Tanaka
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...