Hiroaki Oizumi

Person

Kokubunji, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Optical element and projection exposure apparatus employing the same
- Patent number 5,485,497
- Issue date Jan 16, 1996
- Hitachi, Ltd.
- Hiroaki Oizumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray exposure method with an X-ray mask comprising phase shifter s...
- Patent number 5,372,916
- Issue date Dec 13, 1994
- Hitachi, Ltd.
- Taro Ogawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection type X-ray lithography apparatus
- Patent number 5,305,364
- Issue date Apr 19, 1994
- Hitachi, Ltd.
- Kozo Mochiji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reflection mask
- Patent number 5,272,744
- Issue date Dec 21, 1993
- Hitachi, Ltd.
- Masaaki Itou
- B82 - NANO-TECHNOLOGY
Information Patent Grant
X-ray mask and method for producing same
- Patent number 5,177,773
- Issue date Jan 5, 1993
- Hitachi, Ltd.
- Hiroaki Oizumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for production of graft copolymer, pattern replication metho...
- Patent number 5,017,458
- Issue date May 21, 1991
- Hitachi, Ltd.
- Yasunari Soda
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Method for forming pattern by using graft copolymerization
- Patent number 4,960,676
- Issue date Oct 2, 1990
- Hitachi, Ltd.
- Kozo Mochiji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern fabrication by radiation-induced graft copolymerization
- Patent number 4,954,424
- Issue date Sep 4, 1990
- Hitachi, Ltd.
- Kozo Mochiji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hiroaki Oizumi

Person

Patents Grantslast 30 patents

Optical element and projection exposure apparatus employing the same

X-ray exposure method with an X-ray mask comprising phase shifter s...

Projection type X-ray lithography apparatus

Reflection mask

X-ray mask and method for producing same

Method for production of graft copolymer, pattern replication metho...

Method for forming pattern by using graft copolymerization

Pattern fabrication by radiation-induced graft copolymerization