Hiroaki Saeki

Person

Yamanashi-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor processing system
- Patent number 7,857,569
- Issue date Dec 28, 2010
- Tokyo Electron Limited
- Tsutomu Hiroki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Transportation apparatus and drive mechanism
- Patent number 7,837,425
- Issue date Nov 23, 2010
- Tokyo Electron Limited
- Hiroaki Saeki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Processed body carrying device, and processing system with carrying...
- Patent number 7,622,006
- Issue date Nov 24, 2009
- Tokyo Electron Limited
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Untreated body transfer device and semiconductor manufacturing devi...
- Patent number 7,393,172
- Issue date Jul 1, 2008
- Tokyo Electron Limited
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Port structure in semiconductor processing system
- Patent number 7,279,067
- Issue date Oct 9, 2007
- Tokyo Electron Limited
- Tetsuo Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for correcting reference position for transfer mechanism, an...
- Patent number 7,167,805
- Issue date Jan 23, 2007
- Tokyo Electron Limited
- Hiroaki Saeki
- B62 - LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
Information Patent Grant
Semiconductor processing system
- Patent number 7,090,741
- Issue date Aug 15, 2006
- Tokyo Electron Limited
- Masaki Narushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus
- Patent number 6,988,867
- Issue date Jan 24, 2006
- Tokyo Electron Limited
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mounting/demounting device for wafer carrier lid
- Patent number 6,984,097
- Issue date Jan 10, 2006
- Tokyo Electron Limited
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Positioning substrate for semiconductor process
- Patent number 6,950,721
- Issue date Sep 27, 2005
- Tokyo Electron Limited
- Makoto Tashiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveying arm
- Patent number 6,884,019
- Issue date Apr 26, 2005
- Tokyo Electron Limited
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus
- Patent number 6,802,934
- Issue date Oct 12, 2004
- Tokyo Electron Limited
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrying device
- Patent number 6,699,003
- Issue date Mar 2, 2004
- Tokyo Electron Limited
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for attaching target substrate transfer container to semicon...
- Patent number 6,676,356
- Issue date Jan 13, 2004
- Tokyo Electron Limited
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer arm
- Patent number 6,575,691
- Issue date Jun 10, 2003
- Tokyo Electron Limited
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing system
- Patent number 6,540,869
- Issue date Apr 1, 2003
- Tokyo Electron Limited
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus for semiconductor process
- Patent number 6,522,942
- Issue date Feb 18, 2003
- Tokyo Electron Limited
- Masaki Kondo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier system positioning method
- Patent number 6,510,365
- Issue date Jan 21, 2003
- Tokyo Electron Limited
- Yasuhiko Nishinakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for detecting substrate
- Patent number 6,499,367
- Issue date Dec 31, 2002
- Tokyo Electron Limited
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deadlock avoidance method and treatment system for object to be tre...
- Patent number 6,466,835
- Issue date Oct 15, 2002
- Tokyo Electron Limited
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveyor system
- Patent number 6,450,757
- Issue date Sep 17, 2002
- Tokyo Electron Limited
- Hiroaki Saeki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Load-lock mechanism and processing apparatus
- Patent number 6,338,626
- Issue date Jan 15, 2002
- Tokyo Electron Limited
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port
- Patent number 6,186,723
- Issue date Feb 13, 2001
- Shinko Electric Co., Ltd.
- Masanao Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer arm apparatus and semiconductor processing system using th...
- Patent number 6,068,704
- Issue date May 30, 2000
- Tokyo Electron Limited
- Hiroaki Saeki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer for carrying semiconductor wafers and method detecting wafers...
- Patent number 6,053,983
- Issue date Apr 25, 2000
- Tokyo Electron, Ltd.
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-chamber treatment system
- Patent number 5,934,856
- Issue date Aug 10, 1999
- Tokyo Electron Limited
- Teruo Asakawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cassette chamber
- Patent number 5,857,827
- Issue date Jan 12, 1999
- Tokyo Electron Limited
- Teruo Asakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Positioning apparatus and process system having the same
- Patent number 5,740,034
- Issue date Apr 14, 1998
- Tokyo Electronic Limited
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-bias measuring method, apparatus thereof and electrostatic chu...
- Patent number 5,557,215
- Issue date Sep 17, 1996
- Tokyo Electron Limited
- Hiroaki Saeki
- G01 - MEASURING TESTING
Information Patent Grant
Stage having electrostatic chuck and plasma processing apparatus us...
- Patent number 5,460,684
- Issue date Oct 24, 1995
- Tokyo Electron Limited
- Hiroaki Saeki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20080187416
- Publication date Aug 7, 2008
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20070107845
- Publication date May 17, 2007
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transportation apparatus and drive mechanism
- Publication number 20060210387
- Publication date Sep 21, 2006
- TOKYO ELECTRON LIMITED
- Hiroaki Saeki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Device for correcting reference position for transfer mechanism, an...
- Publication number 20060015279
- Publication date Jan 19, 2006
- Hiroaki Saeki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Teaching method and processing system
- Publication number 20050220582
- Publication date Oct 6, 2005
- TOKYO ELECTRON LIMITED
- Motohiro Kumagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate support mechanism for semiconductor processing system
- Publication number 20050155823
- Publication date Jul 21, 2005
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Port structure in semiconductor processing system
- Publication number 20050103270
- Publication date May 19, 2005
- TOKYO ELECTRON LIMITED
- Tetsuo Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processed body carrying device, and processing system with carrying...
- Publication number 20050087300
- Publication date Apr 28, 2005
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing system
- Publication number 20050006230
- Publication date Jan 13, 2005
- Masaki Narushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing system
- Publication number 20040238122
- Publication date Dec 2, 2004
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transfer apparatus
- Publication number 20040062632
- Publication date Apr 1, 2004
- Hiroaki Saeki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Positioning substrate for semiconductor process
- Publication number 20040018745
- Publication date Jan 29, 2004
- Makoto Tashiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Conveying arm
- Publication number 20030190224
- Publication date Oct 9, 2003
- Hiroaki Saeki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Processing apparatus
- Publication number 20030136515
- Publication date Jul 24, 2003
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Carrying device
- Publication number 20030012632
- Publication date Jan 16, 2003
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for detaching/attaching wafer carrier lid
- Publication number 20020179892
- Publication date Dec 5, 2002
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device for attaching target substrate transfer container to semicon...
- Publication number 20020051701
- Publication date May 2, 2002
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing apparatus
- Publication number 20020020355
- Publication date Feb 21, 2002
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing system and transfer apparatus for the same
- Publication number 20020006323
- Publication date Jan 17, 2002
- Tetsuo Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transfer apparatus for semiconductor process
- Publication number 20020002422
- Publication date Jan 3, 2002
- Masaki Kondo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing system
- Publication number 20010053324
- Publication date Dec 20, 2001
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS

Hiroaki Saeki

Person

Patents Grantslast 30 patents

Semiconductor processing system

Transportation apparatus and drive mechanism

Processed body carrying device, and processing system with carrying...

Untreated body transfer device and semiconductor manufacturing devi...

Port structure in semiconductor processing system

Device for correcting reference position for transfer mechanism, an...

Semiconductor processing system

Transfer apparatus

Mounting/demounting device for wafer carrier lid

Positioning substrate for semiconductor process

Conveying arm

Processing apparatus

Carrying device

Device for attaching target substrate transfer container to semicon...

Transfer arm

Semiconductor processing system

Transfer apparatus for semiconductor process

Carrier system positioning method

Device and method for detecting substrate

Deadlock avoidance method and treatment system for object to be tre...

Conveyor system

Load-lock mechanism and processing apparatus

Load port

Transfer arm apparatus and semiconductor processing system using th...

Wafer for carrying semiconductor wafers and method detecting wafers...

Multi-chamber treatment system

Cassette chamber

Positioning apparatus and process system having the same

Self-bias measuring method, apparatus thereof and electrostatic chu...

Stage having electrostatic chuck and plasma processing apparatus us...

Patents Applicationslast 30 patents

SEMICONDUCTOR PROCESSING SYSTEM

SEMICONDUCTOR PROCESSING SYSTEM

Transportation apparatus and drive mechanism

Device for correcting reference position for transfer mechanism, an...

Teaching method and processing system

Substrate support mechanism for semiconductor processing system

Port structure in semiconductor processing system

Processed body carrying device, and processing system with carrying...

Semiconductor processing system

Semiconductor processing system

Transfer apparatus

Positioning substrate for semiconductor process

Conveying arm

Processing apparatus

Carrying device

Apparatus for detaching/attaching wafer carrier lid

Device for attaching target substrate transfer container to semicon...

Processing apparatus

Semiconductor processing system and transfer apparatus for the same

Transfer apparatus for semiconductor process

Semiconductor processing system