Hiroaki TOMURO

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Tochigi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 10,820,400
- Issue date Oct 27, 2020
- Gigaphoton Inc.
- Hiroaki Tomuro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20200077501
- Publication date Mar 5, 2020
- Gigaphoton Inc.
- Hiroaki TOMURO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM, EXTREME ULTRAVIOLET LI...
- Publication number 20170280545
- Publication date Sep 28, 2017
- Kyushu University, National University Corporation
- Kentaro TOMITA
- G01 - MEASURING TESTING