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Hiroaki Uchida
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Horikawa-dori, JP
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last 30 patents
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Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
8,038,799
Issue date
Oct 18, 2011
Kurita Water Industries Ltd.
Tatsuo Nagai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing apparatus
Patent number
7,938,129
Issue date
May 10, 2011
Dainippon Screen Mfg. Co., Ltd.
Toshio Hiroe
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20100175714
Publication date
Jul 15, 2010
Tatsuo Nagai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
Publication number
20090107522
Publication date
Apr 30, 2009
Hiroaki Uchida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20070240743
Publication date
Oct 18, 2007
Toshio Hiroe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate treating method and apparatus
Publication number
20040242004
Publication date
Dec 2, 2004
Dainippon Screen Mfg. Co., Ltd.
Hajime Shirakawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...