Hiroaki UCHIDA

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Nirasaki-shi, JP

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Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS AND GAS INJECTION MEMBER
- Publication number 20110283942
- Publication date Nov 24, 2011
- TOKYO ELECTRON LIMITED
- Teruo IWATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...