Hiroaki Yokoi

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Nirasaki-shi, JP

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Patents Applicationslast 30 patents

Information Patent Application
FILM FORMATION METHOD AND APPARATUS UTILIZING PLASMA CVD
- Publication number 20100240216
- Publication date Sep 23, 2010
- Kunihiro Tada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film formation method and apparatus utilizing plasma CVD
- Publication number 20050233093
- Publication date Oct 20, 2005
- Kunihiro Tada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film-formation method for semiconductor process
- Publication number 20050136657
- Publication date Jun 23, 2005
- TOKYO ELECTRON LIMITED
- Hiroaki Yokoi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate treatment device, substrate treatment method, and cleanin...
- Publication number 20040081757
- Publication date Apr 29, 2004
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...