Hirofumi Arai

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Tama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Heating/cooling pedestal for semiconductor-processing apparatus
- Patent number 9,353,441
- Issue date May 31, 2016
- ASM IP Holding B.V.
- Hsiao Pei Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming SiOCH film using organoaminosilane annealing
- Patent number 9,190,263
- Issue date Nov 17, 2015
- ASM IP Holding B.V.
- Dai Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for restoring porous surface of dielectric layer by UV light...
- Patent number 9,136,108
- Issue date Sep 15, 2015
- ASM IP Holding B.V.
- Kiyohiro Matsushita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning CVD equipment processing chamber
- Patent number 7,234,476
- Issue date Jun 26, 2007
- ASM Japan K.K.
- Hirofumi Arai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method For Restoring Porous Surface Of Dielectric Layer By UV Light...
- Publication number 20150064932
- Publication date Mar 5, 2015
- ASM IP HOLDING B.V.
- Kiyohiro Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Forming SiOCH Film Using Organoaminosilane Annealing
- Publication number 20150056821
- Publication date Feb 26, 2015
- ASM IP HOLDING B.V.
- Dai Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heating/Cooling Pedestal for Semiconductor-Processing Apparatus
- Publication number 20140096716
- Publication date Apr 10, 2014
- ASM IP HOLDING B.V.
- Hsiao Pei Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING AMORPHOUSE SILICON FILM BY PLASMA CVD
- Publication number 20080299747
- Publication date Dec 4, 2008
- ASM JAPAN K.K.
- Hirofumi ARAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of cleaning CVD equipment processing chamber
- Publication number 20030170402
- Publication date Sep 11, 2003
- Hirofumi Arai
- B08 - CLEANING