Hirofumi Asanuma

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate support device and plasma processing apparatus
- Patent number 8,252,118
- Issue date Aug 28, 2012
- Canon Anelva Corporation
- Yohsuke Shibuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
STACKED LOAD LOCK CHAMBER AND SUBSTRATE PROCESSING APPARATUS INCLUD...
- Publication number 20090320948
- Publication date Dec 31, 2009
- Canon ANELVA Corporation
- Hirofumi Asanuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT DEVICE AND PLASMA PROCESSING APPARATUS
- Publication number 20090308537
- Publication date Dec 17, 2009
- Canon ANELVA Corporation
- Yohsuke Shibuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...