Hirofumi EITOKU

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Kudamatsu, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for plasma processing
- Patent number 10,121,640
- Issue date Nov 6, 2018
- Hitachi High-Technologies Corporation
- Satoru Muto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for plasma processing
- Patent number 8,969,211
- Issue date Mar 3, 2015
- Hitachi High-Technologies Corporation
- Satoru Muto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR PLASMA PROCESSING
- Publication number 20150170880
- Publication date Jun 18, 2015
- Hitachi High-Technologies Corporation
- Satoru MUTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PLASMA PROCESSING
- Publication number 20140302682
- Publication date Oct 9, 2014
- Hitachi High-Technologies Corporation
- Satoru MUTO
- H01 - BASIC ELECTRIC ELEMENTS