Hirofumi Ichihara

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate peripheral portion measuring device, and substrate periph...
- Patent number 10,134,614
- Issue date Nov 20, 2018
- Ebara Corporation
- Mitsuo Tada
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PERIPHERAL PORTION MEASURING DEVICE, AND SUBSTRATE PERIPH...
- Publication number 20150101752
- Publication date Apr 16, 2015
- EBARA CORPORATION
- Mitsuo TADA
- G01 - MEASURING TESTING
Information Patent Application
Substrate Peripheral Portion Measuring Device, and Substrate Periph...
- Publication number 20080274670
- Publication date Nov 6, 2008
- EBARA CORPORATION
- Mitsuo Tada
- B24 - GRINDING POLISHING