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Hirofumi Kaneko
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Patents Grants
last 30 patents
Information
Patent Grant
Processing apparatus
Patent number
11,302,542
Issue date
Apr 12, 2022
Tokyo Electron Limited
Masato Kadobe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
10,636,627
Issue date
Apr 28, 2020
Tokyo Electron Limited
Hirofumi Kaneko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Heat treatment apparatus
Patent number
10,465,986
Issue date
Nov 5, 2019
Tokyo Electron Limited
Hirofumi Kaneko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Heat treatment apparatus
Patent number
10,281,214
Issue date
May 7, 2019
Tokyo Electron Limited
Hirofumi Kaneko
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Heat treatment apparatus
Patent number
9,845,991
Issue date
Dec 19, 2017
Tokyo Electron Limited
Hirofumi Kaneko
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Heat treatment apparatus
Patent number
9,759,489
Issue date
Sep 12, 2017
Tokyo Electron Limited
Hirofumi Kaneko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Reaction tube and heat processing apparatus for a semiconductor pro...
Patent number
8,216,378
Issue date
Jul 10, 2012
Tokyo Electron Limited
Hirofumi Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vertical heat treatment apparatus and method for operating the same
Patent number
8,177,550
Issue date
May 15, 2012
Tokyo Electron Limited
Kenjiro Haraki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vertical type heat processing apparatus and vertical type heating m...
Patent number
7,798,811
Issue date
Sep 21, 2010
Tokyo Electron Limited
Hiromi Nitadori
F27 - FURNACES KILNS OVENS RETORTS
Patents Applications
last 30 patents
Information
Patent Application
PROCESSING APPARATUS
Publication number
20200227293
Publication date
Jul 16, 2020
TOKYO ELECTRON LIMITED
Masato KADOBE
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Application
Heat Treatment Apparatus
Publication number
20170336143
Publication date
Nov 23, 2017
TOKYO ELECTRON LIMITED
Hirofumi KANEKO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate Processing Apparatus
Publication number
20160276206
Publication date
Sep 22, 2016
TOKYO ELECTRON LIMITED
Hirofumi KANEKO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HEAT TREATMENT APPARATUS, METHOD OF INSTALLING SUBSTRATE...
Publication number
20150214080
Publication date
Jul 30, 2015
TOKYO ELECTRON LIMITED
Katsuhiko Oyama
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
HEAT TREATMENT APPARATUS
Publication number
20140120487
Publication date
May 1, 2014
TOKYO ELECTRON LIMITED
Hirofumi KANEKO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEAT TREATMENT APPARATUS
Publication number
20140072924
Publication date
Mar 13, 2014
TOKYO ELECTRON LIMITED
Hirofumi KANEKO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEAT TREATMENT APPARATUS
Publication number
20140072925
Publication date
Mar 13, 2014
TOKYO ELECTRON LIMITED
Hirofumi KANEKO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HEAT TREATMENT APPARATUS
Publication number
20120260857
Publication date
Oct 18, 2012
TOKYO ELECTRON LIMITED
Kiyohiko TAKAHASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
REACTION TUBE AND HEAT PROCESSING APPARATUS FOR A SEMICONDUCTOR PRO...
Publication number
20090250005
Publication date
Oct 8, 2009
TOKYO ELECTRON LIMITED
Hirofumi Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vertical heat treatment apparatus and method for operating the same
Publication number
20090053665
Publication date
Feb 26, 2009
Kenjiro Haraki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vertical type heat processing apparatus and vertical type heating m...
Publication number
20080153049
Publication date
Jun 26, 2008
TOKYO ELECTRON LIMITED
Hiromi Nitadori
F27 - FURNACES KILNS OVENS RETORTS