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Hirofumi Katsumata
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Fuji-city, JP
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Patents Grants
last 30 patents
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Patent Grant
Method and apparatus for controlling rise and fall of temperature i...
Patent number
6,461,428
Issue date
Oct 8, 2002
Toshiba Ceramics Co., Ltd.
Shyuji Tobashi
C30 - CRYSTAL GROWTH
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Patent Grant
Wafer heating device and method of controlling the same
Patent number
6,250,914
Issue date
Jun 26, 2001
Toshiba Machine Co., Ltd.
Hirofumi Katsumata
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
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Patent Application
Method and apparatus for controlling rise and fall of temperature i...
Publication number
20010020439
Publication date
Sep 13, 2001
Shyuji Tobashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...