Hirofumi Minami

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate transport device and substrate transporting method
- Patent number 11,628,565
- Issue date Apr 18, 2023
- Ulvac, Inc.
- Kazuhiro Musha
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate transport device and substrate transporting method
- Patent number 11,559,889
- Issue date Jan 24, 2023
- Ulvac, Inc.
- Kazuhiro Musha
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Vacuum processing apparatus
- Patent number 10,612,130
- Issue date Apr 7, 2020
- Ulvac, Inc.
- Hirofumi Minami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotation-transmitting mechanism, conveying apparatus, and driving a...
- Patent number 9,193,067
- Issue date Nov 24, 2015
- SOWA MD CENTER CO., LTD
- Kazuhiro Fujimura
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Seal mechanism and treatment apparatus
- Patent number 8,840,116
- Issue date Sep 23, 2014
- ULVAC, Inc.
- Kazuhiro Musha
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Substrate conveyance method and substrate conveyance system
- Patent number 8,717,737
- Issue date May 6, 2014
- ULVAC, Inc.
- Hirofumi Minami
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Conveying device and vacuum apparatus
- Patent number 8,505,991
- Issue date Aug 13, 2013
- Ulvac, Inc.
- Hirofumi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage apparatus
- Patent number 8,408,503
- Issue date Apr 2, 2013
- Ulvac, Inc.
- Yasuzo Tanaka
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Transport apparatus
- Patent number 8,382,421
- Issue date Feb 26, 2013
- Ulvac, Inc.
- Kazuhiro Musha
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Rotation introduction mechanism, substrate transfer apparatus, and...
- Patent number 8,366,375
- Issue date Feb 5, 2013
- ULVAC, Inc.
- Kazuhiro Musha
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Stage apparatus assembling method
- Patent number 8,286,318
- Issue date Oct 16, 2012
- Ulvac, Inc.
- Yasuzo Tanaka
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Discharge unit and discharge apparatus
- Patent number 8,167,417
- Issue date May 1, 2012
- Ulvac, Inc.
- Takahiro Miyata
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Stage apparatus
- Patent number 8,100,524
- Issue date Jan 24, 2012
- Ulvac, Inc.
- Yasuzo Tanaka
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Transport apparatus, control method for the same, and vacuum proces...
- Patent number 7,645,112
- Issue date Jan 12, 2010
- Ulvac Inc.
- Hirofumi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrying mechanism, a carrying device and a vacuum processing appar...
- Patent number 7,591,625
- Issue date Sep 22, 2009
- Ulvac, Inc.
- Hirofumi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport apparatus, control method for the same, and vacuum proces...
- Patent number 7,572,093
- Issue date Aug 11, 2009
- Ulvac Inc.
- Hirofumi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport apparatus and vacuum processing system using the same
- Patent number 6,840,732
- Issue date Jan 11, 2005
- Ulvac, Inc.
- Hirofumi Minami
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Apparatus for measuring weak static magnetic field using supercondu...
- Patent number 5,184,072
- Issue date Feb 2, 1993
- Research Development Corporation
- Junpei Yuyama
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for positioning a pick-up coil for detecting magnetic flu...
- Patent number 5,053,707
- Issue date Oct 1, 1991
- Research Development Corporation of Japan
- Junpei Yuyama
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSPORT DEVICE AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20210107149
- Publication date Apr 15, 2021
- ULVAC, Inc.
- Kazuhiro MUSHA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TRANSPORT DEVICE AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20210101281
- Publication date Apr 8, 2021
- ULVAC, Inc.
- Kazuhiro MUSHA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20190233224
- Publication date Aug 1, 2019
- ULVAC, Inc.
- Hirofumi MINAMI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
Substrate Conveyance Method and Substrate Conveyance System
- Publication number 20130129462
- Publication date May 23, 2013
- Ulvac, Inc.
- Hirofumi Minami
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
CONVEYING DEVICE AND VACUUM APPARATUS
- Publication number 20120288347
- Publication date Nov 15, 2012
- ULVAC, Inc.
- Hirofumi MINAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTATION-TRANSMITTING MECHANISM, CONVEYING APPARATUS, AND DRIVING A...
- Publication number 20120251287
- Publication date Oct 4, 2012
- Kazuhiro Fujimura
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
HOLDING APPARATUS, CONVEYING APPARATUS, AND ROTATION-TRANSMITTING A...
- Publication number 20120114456
- Publication date May 10, 2012
- Kazuhiro Musha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOLDING APPARATUS, CONVEYING APPARATUS, AND ROTATION-TRANSMITTING A...
- Publication number 20120025054
- Publication date Feb 2, 2012
- Kazuhiro Musha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Seal Mechanism and Treatment Apparatus
- Publication number 20110227294
- Publication date Sep 22, 2011
- ULVAC, Inc.
- Kazuhiro Musha
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
CONVEYING DEVICE AND VACUUM APPARATUS
- Publication number 20110211936
- Publication date Sep 1, 2011
- ULVAC, Inc.
- Hirofumi MINAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISCHARGE UNIT AND DISCHARGE APPARATUS
- Publication number 20110199441
- Publication date Aug 18, 2011
- ULVAC, Inc.
- Takahiro MIYATA
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
STAGE EQUIPPED WITH ALIGNMENT FUNCTION, PROCESSING APPARATUS HAVING...
- Publication number 20110062641
- Publication date Mar 17, 2011
- Seiichi Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE APPARATUS
- Publication number 20100177153
- Publication date Jul 15, 2010
- ULVAC, Inc.
- Yasuzo TANAKA
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
STAGE APPARATUS
- Publication number 20100163703
- Publication date Jul 1, 2010
- ULVAC, Inc.
- Yasuzo TANAKA
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
STAGE APPARATUS ASSEMBLING METHOD
- Publication number 20100146762
- Publication date Jun 17, 2010
- ULVAC, Inc.
- Yasuzo TANAKA
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
ROTATION INTRODUCTION MECHANISM, SUBSTRATE TRANSFER APPARATUS, AND...
- Publication number 20100135751
- Publication date Jun 3, 2010
- Kazuhiro Musha
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TRANSFER DEVICE AND VACUUM PROCESSING APPARATUS USING THE SAME
- Publication number 20100111649
- Publication date May 6, 2010
- ULVAC, Inc.
- Hirofumi MINAMI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Substrate Holding Mechanism and Substrate Assembly Apparatus Includ...
- Publication number 20100109220
- Publication date May 6, 2010
- Ulvac, Inc.
- Kazuhiro Musha
- G02 - OPTICS
Information Patent Application
TRANSPORT APPARATUS
- Publication number 20100040447
- Publication date Feb 18, 2010
- ULVAC, Inc.
- Kazuhiro MUSHA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Stage apparatus
- Publication number 20090173278
- Publication date Jul 9, 2009
- Yasuzou Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus
- Publication number 20090092467
- Publication date Apr 9, 2009
- Yasuzou Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Carrying mechanism, a carrying device and a vacuum processing appar...
- Publication number 20080226430
- Publication date Sep 18, 2008
- ULVAC, INC.,
- Hirofumi Minami
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Transport apparatus, control method for the same, and vacuum proces...
- Publication number 20050286993
- Publication date Dec 29, 2005
- ULVAC, Inc.
- Hirofumi Minami
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Transport apparatus, control method for the same, and vacuum proces...
- Publication number 20050232744
- Publication date Oct 20, 2005
- ULVAC, Inc.
- Hirofumi Minami
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Transport apparatus and vacuum processing system using the same
- Publication number 20050095112
- Publication date May 5, 2005
- ULVAC, Inc.
- Hirofumi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transport apparatus and vacuum processing system using the same
- Publication number 20020048502
- Publication date Apr 25, 2002
- Ulvac Inc.
- Hirofumi Minami
- H01 - BASIC ELECTRIC ELEMENTS

Hirofumi Minami

Person

Patents Grantslast 30 patents

Substrate transport device and substrate transporting method

Substrate transport device and substrate transporting method

Vacuum processing apparatus

Rotation-transmitting mechanism, conveying apparatus, and driving a...

Seal mechanism and treatment apparatus

Substrate conveyance method and substrate conveyance system

Conveying device and vacuum apparatus

Stage apparatus

Transport apparatus

Rotation introduction mechanism, substrate transfer apparatus, and...

Stage apparatus assembling method

Discharge unit and discharge apparatus

Stage apparatus

Transport apparatus, control method for the same, and vacuum proces...

Carrying mechanism, a carrying device and a vacuum processing appar...

Transport apparatus, control method for the same, and vacuum proces...

Transport apparatus and vacuum processing system using the same

Apparatus for measuring weak static magnetic field using supercondu...

Apparatus for positioning a pick-up coil for detecting magnetic flu...

Patents Applicationslast 30 patents

SUBSTRATE TRANSPORT DEVICE AND SUBSTRATE TRANSPORTING METHOD

SUBSTRATE TRANSPORT DEVICE AND SUBSTRATE TRANSPORTING METHOD

VACUUM PROCESSING APPARATUS

Substrate Conveyance Method and Substrate Conveyance System

CONVEYING DEVICE AND VACUUM APPARATUS

ROTATION-TRANSMITTING MECHANISM, CONVEYING APPARATUS, AND DRIVING A...

HOLDING APPARATUS, CONVEYING APPARATUS, AND ROTATION-TRANSMITTING A...

HOLDING APPARATUS, CONVEYING APPARATUS, AND ROTATION-TRANSMITTING A...

Seal Mechanism and Treatment Apparatus

CONVEYING DEVICE AND VACUUM APPARATUS

DISCHARGE UNIT AND DISCHARGE APPARATUS

STAGE EQUIPPED WITH ALIGNMENT FUNCTION, PROCESSING APPARATUS HAVING...

STAGE APPARATUS

STAGE APPARATUS

STAGE APPARATUS ASSEMBLING METHOD

ROTATION INTRODUCTION MECHANISM, SUBSTRATE TRANSFER APPARATUS, AND...

TRANSFER DEVICE AND VACUUM PROCESSING APPARATUS USING THE SAME

Substrate Holding Mechanism and Substrate Assembly Apparatus Includ...

TRANSPORT APPARATUS

Stage apparatus

Stage apparatus

Carrying mechanism, a carrying device and a vacuum processing appar...

Transport apparatus, control method for the same, and vacuum proces...

Transport apparatus, control method for the same, and vacuum proces...

Transport apparatus and vacuum processing system using the same

Transport apparatus and vacuum processing system using the same