Hirofumi Morita

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam writing apparatus
- Patent number 12,009,175
- Issue date Jun 11, 2024
- NuFlare Technology, Inc.
- Hirofumi Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing apparatus
- Patent number 11,908,659
- Issue date Feb 20, 2024
- NuFlare Technology, Inc.
- Toshiki Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam adjustment method, multi charged partic...
- Patent number 11,804,360
- Issue date Oct 31, 2023
- NuFlare Technology, Inc.
- Tsubasa Nanao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 11,756,766
- Issue date Sep 12, 2023
- NuFlare Technology, Inc.
- Takahito Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, multi-charged-particle beam writing apparatus...
- Patent number 11,721,520
- Issue date Aug 8, 2023
- NuFlare Technology, Inc.
- Kei Obara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam blanking device and multi-charged-particle-beam writing...
- Patent number 11,355,302
- Issue date Jun 7, 2022
- NuFlare Technology, Inc.
- Hiroshi Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing apparatus
- Patent number 11,217,428
- Issue date Jan 4, 2022
- NuFlare Technology, Inc.
- Mitsuhiro Okazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 10,998,164
- Issue date May 4, 2021
- NuFlare Technology, Inc.
- Takanao Touya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-charged-particle beam writing apparatus
- Patent number 10,811,224
- Issue date Oct 20, 2020
- NuFlare Technology, Inc.
- Hirofumi Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam drawing apparatus and multi charged par...
- Patent number 10,388,488
- Issue date Aug 20, 2019
- NuFlare Technology, Inc.
- Hirofumi Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Blanking device for multi charged particle beams, and multi charged...
- Patent number 10,224,171
- Issue date Mar 5, 2019
- NuFlare Technology, Inc.
- Takanao Touya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam optical system adjustment method, and multi-beam exposur...
- Patent number 10,224,172
- Issue date Mar 5, 2019
- NuFlare Technology, Inc.
- Munehiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing method and multi charged partic...
- Patent number 9,991,086
- Issue date Jun 5, 2018
- NuFlare Technology, Inc.
- Hirofumi Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam irradiation apparatus, multi charged pa...
- Patent number 9,916,962
- Issue date Mar 13, 2018
- NuFlare Technology, Inc.
- Shinsuke Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Blanking aperture array device for multi-beams, and fabrication met...
- Patent number 9,530,610
- Issue date Dec 27, 2016
- NuFlare Technology, Inc.
- Kazuhiro Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronic device
- Patent number 9,391,029
- Issue date Jul 12, 2016
- Kabushiki Kaisha Toshiba
- Shinya Hayashiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Blanking device for multi charged particle beams, and multi charged...
- Patent number 9,330,881
- Issue date May 3, 2016
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronic device
- Patent number 9,141,143
- Issue date Sep 22, 2015
- Kabushiki Kaisha Toshiba
- Hirofumi Morita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Television apparatus, electronic apparatus, and lens
- Patent number 9,001,277
- Issue date Apr 7, 2015
- Kabushiki Kaisha Toshiba
- Hirofumi Morita
- G02 - OPTICS
Information Patent Grant
Mirror device, mirror array, optical switch, mirror device manufact...
- Patent number 8,634,121
- Issue date Jan 21, 2014
- Nippon Telegraph and Telephone Corporation
- Fusao Shimokawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror device, mirror array, optical switch, mirror device manufact...
- Patent number 8,582,189
- Issue date Nov 12, 2013
- Nippon Telegraph and Telephone Corporation
- Fusao Shimokawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror device, mirror array, optical switch, mirror device manufact...
- Patent number 8,462,410
- Issue date Jun 11, 2013
- Nippon Telegraph and Telephone Corporation
- Fusao Shimokawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror device, mirror array, optical switch, mirror device manufact...
- Patent number 8,149,489
- Issue date Apr 3, 2012
- Nippon Telegraph and Telephone Corporation
- Fusao Shimokawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic apparatus
- Patent number 8,004,859
- Issue date Aug 23, 2011
- Kabushiki Kaisha Toshiba
- Hirofumi Morita
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical module and manufacturing method therefor
- Patent number 7,076,135
- Issue date Jul 11, 2006
- Nippon Telegraph and Telephone Corporation
- Koji Yamada
- G02 - OPTICS
Information Patent Grant
Disk array device including a memory with backup power supply and m...
- Patent number 6,816,981
- Issue date Nov 9, 2004
- Fujitsu Limited
- Hirofumi Morita
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
BLANKING APERTURE ARRAY MECHANISM AND WRITING APPARATUS
- Publication number 20240395493
- Publication date Nov 28, 2024
- NuFlare Technology, Inc.
- Toshiki KUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20240242933
- Publication date Jul 18, 2024
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20240242919
- Publication date Jul 18, 2024
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20240242920
- Publication date Jul 18, 2024
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20240242922
- Publication date Jul 18, 2024
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM WRITING APPARATUS AND ELECTRON BEAM WRITING METHOD
- Publication number 20240087845
- Publication date Mar 14, 2024
- NuFlare Technology, Inc.
- Haruyuki NOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOUNTING SUBSTRATE, BLANKING APERTURE ARRAY CHIP, BLANKING APERTURE...
- Publication number 20240013999
- Publication date Jan 11, 2024
- NuFlare Technology, Inc.
- Toshiki KIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM EVALUATION METHOD, MULTI CHARGED PARTIC...
- Publication number 20230402253
- Publication date Dec 14, 2023
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL SYSTEM ADJUSTMENT METHOD FOR MULTI CHARGED PARTICLE BEAM AP...
- Publication number 20230260749
- Publication date Aug 17, 2023
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
- Publication number 20230055778
- Publication date Feb 23, 2023
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM ADJUSTMENT METHOD, MULTI CHARGED PARTIC...
- Publication number 20230005711
- Publication date Jan 5, 2023
- NuFlare Technology, Inc.
- Tsubasa NANAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20220399181
- Publication date Dec 15, 2022
- NuFlare Technology, Inc.
- Toshiki KIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20220328278
- Publication date Oct 13, 2022
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20220319807
- Publication date Oct 6, 2022
- NuFlare Technology, Inc.
- Takahito NAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, MULTI-CHARGED-PARTICLE BEAM WRITING APPARATUS...
- Publication number 20220270850
- Publication date Aug 25, 2022
- NuFlare Technology, Inc.
- Kei OBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM BLANKING DEVICE AND MULTI-CHARGED-PARTICLE-BEAM WRITING...
- Publication number 20210296074
- Publication date Sep 23, 2021
- NuFlare Technology, Inc.
- Hiroshi YAMASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20200343073
- Publication date Oct 29, 2020
- NuFlare Technology, Inc.
- Mitsuhiro OKAZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20190371565
- Publication date Dec 5, 2019
- NuFlare Technology, Inc.
- Takanao TOUYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-CHARGED-PARTICLE BEAM WRITING APPARATUS
- Publication number 20190122856
- Publication date Apr 25, 2019
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
- Publication number 20180358203
- Publication date Dec 13, 2018
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM DRAWING APPARATUS AND MULTI CHARGED PAR...
- Publication number 20180350552
- Publication date Dec 6, 2018
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM OPTICAL SYSTEM ADJUSTMENT METHOD, AND MULTI-BEAM EXPOSUR...
- Publication number 20180130632
- Publication date May 10, 2018
- NuFlare Technology, Inc.
- Munehiro OGASAWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BLANKING DEVICE FOR MULTI CHARGED PARTICLE BEAMS, AND MULTI CHARGED...
- Publication number 20170345612
- Publication date Nov 30, 2017
- NuFlare Technology, Inc.
- Takanao TOUYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM IRRADIATION APPARATUS, MULTI CHARGED PA...
- Publication number 20170309440
- Publication date Oct 26, 2017
- NuFlare Technology, Inc.
- Shinsuke NISHIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
- Publication number 20170207056
- Publication date Jul 20, 2017
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VISUAL INFORMATION TECHNOLOGY DEVICE
- Publication number 20160306175
- Publication date Oct 20, 2016
- Kabushiki Kaisha Toshiba
- Hirofumi Morita
- G02 - OPTICS
Information Patent Application
BLANKING APERTURE ARRAY DEVICE FOR MULTI-BEAMS, AND FABRICATION MET...
- Publication number 20160155600
- Publication date Jun 2, 2016
- NuFlare Technology, Inc.
- Kazuhiro CHIBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BLANKING DEVICE FOR MULTI CHARGED PARTICLE BEAMS, AND MULTI CHARGED...
- Publication number 20160064178
- Publication date Mar 3, 2016
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC DEVICE, MOUNTING MEMBER, AND MOUNTING METHOD
- Publication number 20160066437
- Publication date Mar 3, 2016
- Kabushiki Kaisha Toshiba
- Wenhsiang WU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTRONIC DEVICE, MOUNTING MEMBER, AND MOUNTING METHOD
- Publication number 20160066450
- Publication date Mar 3, 2016
- Kabushiki Kaisha Toshiba
- Hirofumi MORITA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Hirofumi Morita

Person

Patents Grantslast 30 patents

Charged particle beam writing apparatus

Multi charged particle beam writing apparatus

Multi charged particle beam adjustment method, multi charged partic...

Charged particle beam writing apparatus and charged particle beam w...

Semiconductor device, multi-charged-particle beam writing apparatus...

Multi-beam blanking device and multi-charged-particle-beam writing...

Multi charged particle beam writing apparatus

Charged particle beam writing apparatus and charged particle beam w...

Multi-charged-particle beam writing apparatus

Multi charged particle beam drawing apparatus and multi charged par...

Blanking device for multi charged particle beams, and multi charged...

Multi-beam optical system adjustment method, and multi-beam exposur...

Multi charged particle beam writing method and multi charged partic...

Multi charged particle beam irradiation apparatus, multi charged pa...

Blanking aperture array device for multi-beams, and fabrication met...

Electronic device

Blanking device for multi charged particle beams, and multi charged...

Electronic device

Television apparatus, electronic apparatus, and lens

Mirror device, mirror array, optical switch, mirror device manufact...

Mirror device, mirror array, optical switch, mirror device manufact...

Mirror device, mirror array, optical switch, mirror device manufact...

Mirror device, mirror array, optical switch, mirror device manufact...

Electronic apparatus

Optical module and manufacturing method therefor

Disk array device including a memory with backup power supply and m...

Patents Applicationslast 30 patents

BLANKING APERTURE ARRAY MECHANISM AND WRITING APPARATUS

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

ELECTRON BEAM WRITING APPARATUS AND ELECTRON BEAM WRITING METHOD

MOUNTING SUBSTRATE, BLANKING APERTURE ARRAY CHIP, BLANKING APERTURE...

MULTI CHARGED PARTICLE BEAM EVALUATION METHOD, MULTI CHARGED PARTIC...

OPTICAL SYSTEM ADJUSTMENT METHOD FOR MULTI CHARGED PARTICLE BEAM AP...

MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...

MULTI CHARGED PARTICLE BEAM ADJUSTMENT METHOD, MULTI CHARGED PARTIC...

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

CHARGED PARTICLE BEAM WRITING APPARATUS

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

SEMICONDUCTOR DEVICE, MULTI-CHARGED-PARTICLE BEAM WRITING APPARATUS...

MULTI-BEAM BLANKING DEVICE AND MULTI-CHARGED-PARTICLE-BEAM WRITING...

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

MULTI-CHARGED-PARTICLE BEAM WRITING APPARATUS

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...

MULTI CHARGED PARTICLE BEAM DRAWING APPARATUS AND MULTI CHARGED PAR...

MULTI-BEAM OPTICAL SYSTEM ADJUSTMENT METHOD, AND MULTI-BEAM EXPOSUR...

BLANKING DEVICE FOR MULTI CHARGED PARTICLE BEAMS, AND MULTI CHARGED...

MULTI CHARGED PARTICLE BEAM IRRADIATION APPARATUS, MULTI CHARGED PA...

MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...

VISUAL INFORMATION TECHNOLOGY DEVICE

BLANKING APERTURE ARRAY DEVICE FOR MULTI-BEAMS, AND FABRICATION MET...

BLANKING DEVICE FOR MULTI CHARGED PARTICLE BEAMS, AND MULTI CHARGED...

ELECTRONIC DEVICE, MOUNTING MEMBER, AND MOUNTING METHOD

ELECTRONIC DEVICE, MOUNTING MEMBER, AND MOUNTING METHOD