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Hirofumi Ohki
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Akishima-shi, JP
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last 30 patents
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Patent Grant
Method for improving sensitivity of resist
Patent number
8,178,281
Issue date
May 15, 2012
Showa Denko K.K.
Hirofumi Ohki
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
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Patent Application
METHOD FOR IMPROVING SENSITIVITY OF RESIST
Publication number
20110143283
Publication date
Jun 16, 2011
Showa Denko K.K.
Hirofumi Ohki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY