Hirofumi Ookuma

Person

  • Kumamoto, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Coating film forming apparatus and coating unit

    • Patent number 7,087,118
    • Issue date Aug 8, 2006
    • Tokyo Electron Limited
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Coating film forming apparatus and coating unit

    • Patent number 6,936,107
    • Issue date Aug 30, 2005
    • Tokyo Electron Limited
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Film forming unit

    • Patent number 6,872,256
    • Issue date Mar 29, 2005
    • Tokyo Electron Limited
    • Takahiro Kitano
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Coating method

    • Patent number 6,830,774
    • Issue date Dec 14, 2004
    • Tokyo Electron Limited
    • Shinichi Hayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Coating apparatus

    • Patent number 6,790,283
    • Issue date Sep 14, 2004
    • Tokyo Electron Limited
    • Shinichi Hayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Coating film forming apparatus and coating film forming method

    • Patent number 6,716,478
    • Issue date Apr 6, 2004
    • Tokyo Electron Limited
    • Takahiro Kitano
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Coating film forming apparatus and coating unit

    • Patent number 6,676,757
    • Issue date Jan 13, 2004
    • Tokyo Electron Limited
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Film forming unit

    • Patent number 6,616,760
    • Issue date Sep 9, 2003
    • Tokyo Electron Limited
    • Takahiro Kitano
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Treatment solution supply apparatus and treatment solution supply m...

    • Patent number 6,616,762
    • Issue date Sep 9, 2003
    • Tokyo Electron Limited
    • Hiroichi Inada
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Coating film forming apparatus

    • Patent number 6,605,153
    • Issue date Aug 12, 2003
    • Tokyo Electron Limited
    • Takahiro Kitano
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Film forming unit

    • Patent number 6,514,344
    • Issue date Feb 4, 2003
    • Tokyo Electron Limited
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Coating film forming apparatus and coating film forming method

    • Patent number 6,383,948
    • Issue date May 7, 2002
    • Tokyo Electron Limited
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Coating film forming apparatus and coating unit

    • Publication number 20050155550
    • Publication date Jul 21, 2005
    • TOKYO ELECTRON LIMITED
    • Takahiro Kitano
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    COATING METHOD

    • Publication number 20040219288
    • Publication date Nov 4, 2004
    • TOKYO ELECTRON LIMITED
    • Shinichi Hayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Coating film forming apparatus and coating unit

    • Publication number 20040134425
    • Publication date Jul 15, 2004
    • TOKYO ELECTRON LIMITED
    • Takahiro Kitano
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Film forming unit

    • Publication number 20040094089
    • Publication date May 20, 2004
    • Takahiro Kitano
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Coating method and apparatus

    • Publication number 20030113440
    • Publication date Jun 19, 2003
    • TOKYO ELECTRON LIMITED
    • Shinichi Hayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Film forming unit

    • Publication number 20020124798
    • Publication date Sep 12, 2002
    • TOKYO ELECTRON LIMITED
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Coating film forming apparatus and coating film forming method

    • Publication number 20020088393
    • Publication date Jul 11, 2002
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Treatment solution supply apparatus and treatment solution supply m...

    • Publication number 20020043214
    • Publication date Apr 18, 2002
    • Hiroichi Inada
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Coating film forming apparatus

    • Publication number 20010003967
    • Publication date Jun 21, 2001
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Film forming apparatus

    • Publication number 20010003966
    • Publication date Jun 21, 2001
    • TOKYO ELECTRON LIMITED
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Film forming unit

    • Publication number 20010003968
    • Publication date Jun 21, 2001
    • TOKYO ELECTRON LIMITED
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Coating film forming apparatus and coating unit

    • Publication number 20010003964
    • Publication date Jun 21, 2001
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS