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Hirofumi Sato
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Naka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Probe navigation method and device and defect inspection device
Patent number
7,598,755
Issue date
Oct 6, 2009
Hitachi High-Technologies Corporation
Takashi Furukawa
G01 - MEASURING TESTING
Information
Patent Grant
Probe navigation method and device and defect inspection device
Patent number
7,372,283
Issue date
May 13, 2008
Hitachi High-Technologies Corporation
Takashi Furukawa
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspecting apparatus
Patent number
7,129,727
Issue date
Oct 31, 2006
Hitachi High-Technologies Corporation
Tsutomu Saito
G01 - MEASURING TESTING
Information
Patent Grant
Probe navigation method and device and defect inspection device
Patent number
7,071,713
Issue date
Jul 4, 2006
Hitachi High-Technologies Corpoartion
Takashi Furukawa
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
PROBE NAVIGATION METHOD AND DEVICE AND DEFECT INSPECTION DEVICE
Publication number
20080218185
Publication date
Sep 11, 2008
Takashi Furukawa
G01 - MEASURING TESTING
Information
Patent Application
Probe navigation method and device and defect inspection device
Publication number
20060192574
Publication date
Aug 31, 2006
Takashi Furukawa
G01 - MEASURING TESTING
Information
Patent Application
Defect inspecting apparatus
Publication number
20060087330
Publication date
Apr 27, 2006
Hitachi High-Technologies Corporation
Tsutomu Saito
G01 - MEASURING TESTING
Information
Patent Application
Probe navigation method and device and defect inspection device
Publication number
20050140379
Publication date
Jun 30, 2005
Takashi Furukawa
G01 - MEASURING TESTING