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Hirofumi SATOU
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Tokyo, JP
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last 30 patents
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Patent Grant
Charged particle beam apparatus
Patent number
10,971,347
Issue date
Apr 6, 2021
HITACHI HIGH-TECH CORPORATION
Mitsuhiro Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20210020422
Publication date
Jan 21, 2021
Hitachi High-Technologies Corporation
Mitsuhiro NAKAMURA
H01 - BASIC ELECTRIC ELEMENTS