Hirofumi SATOU

Person

  • Tokyo, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Charged particle beam apparatus

    • Patent number 10,971,347
    • Issue date Apr 6, 2021
    • HITACHI HIGH-TECH CORPORATION
    • Mitsuhiro Nakamura
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    CHARGED PARTICLE BEAM APPARATUS

    • Publication number 20210020422
    • Publication date Jan 21, 2021
    • Hitachi High-Technologies Corporation
    • Mitsuhiro NAKAMURA
    • H01 - BASIC ELECTRIC ELEMENTS